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SPTS Multiplex ICP Deep trench Etcher, Bosch process for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used SPTS Multiplex ICP Deep trench Etcher, Bosch process.
Please click on the "Get Quote" button at the end of the Multiplex description, if you'd like to get a quotation, photos and specifications of this ICP Deep trench Etcher, Bosch process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SPTS Multiplex ICP Deep trench Etcher, Bosch process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


SPTS Multiplex Equipment Details

SDI ID: 106885
Manufacturer: SPTS
Model: Multiplex
Description: ICP Deep trench Etcher, Bosch process
Version: 150 mm
Vintage: 01.06.1998
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

STS Multiplex ICP deep trench Si etcher using Bosch process.  (150mm)
Deinstalled and warehoused, can be inspected by appointment.
Refer to attached photos for more details.
It is complete and was working prior to deinstallation.
OEM = Surface Technology Systems Limited (AKA: STS)
Model = MESC Multiplex ICP ASE
Type = ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch)
Description of Process = ASE (Advanced Silicon Etch, Bosch Process)
Wafer Size = 150mm
Loader capacity = 2 wafer Carousel
Chuck Type = Mechanical Weighted Clamp
Process Gases:
C4F8 = 300 Sccms
SFG = 600 Sccms
O2 = 100 Sccms
AR = 100 Sccms
Turbo Pump = Leybold Mag 2000 CT
RF Generator 1 = ENI ACG-3
RF Generator 2 = AE RFG 3001 (Advanced Energy)
Vacuum measurement = MKS Instruments
Gate Valve = VAT Throttling Gate Valve
Slit Valve = Vat Slit Valve
Manuals = STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue
Vacuum Pump Loadlock = Edwards Pump E2M40
Vacuum Pump Process Module = Edwards IQDP80 w/IQDB250 Blower (intelligent Interface)
Chiller = Affinity, PWG-060K-BE33CBC2
 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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