SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron TRIAS High K Metal CVD and ALD system, NiOx, HfOx process.
Please click on the "Get Quote" button at the end of the TRIAS description, if you'd like to get a quotation, photos and specifications of this High K Metal CVD and ALD system, NiOx, HfOx process, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron TRIAS High K Metal CVD and ALD system, NiOx, HfOx process is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 108695 |
|---|---|
| Manufacturer: | TEL Tokyo Electron |
| Model: | TRIAS |
| Description: | High K Metal CVD and ALD system, NiOx, HfOx process |
| Version: | 300 MM |
| Vintage: | 01.06.2012 |
| Quantity: | 1 |
| Sales Condition: | inquire |
| Lead Time: | Inquire |
| Sales Price: | Inquire |
| Comments: | Tokyo Electron Trias High K CVD CVD System, 12” 45nm process Vintage 2012 Chambers: CVD ALD Process: NiOx, HfOx Trias cluster: 2 Loadports LM Main power distribution (MPD) Transfer module, TM EX reactor, PM2 Plasma capability: No Includes: Ozonizer H20 Box 2 Touch screens ozonizer High-k CVD reactor PM4:Thermal based deposition Transformer box (Hi-K) option elec box: Machine is in as good as new condition ex R&D facility PM2: Hafnium Nickel Titanium Vanadium PM4: Hafnium Nickel Titanium Ruthenium Strontium |
Get Quote |
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