|LAM Research TCP 9400 SE ENVision|
|Model:||TCP 9400 SE ENVision|
|Description:||Dry poly etching system|
|Sales Condition:||as is where is|
Controller Type VME Software Revision Level E1.6-011 SECS End Point Detection Cassette to Cassette RF Generator Model AE Number of Gas Inputs Eight Gas Process Gases Cl2 100, HCl 200, O2 500, NF3 20, NF3 200, HeO2 .. Accessories Chiller service box, external gas box, coolant line Power Requirements 208 V 80.0 A 50/60 Hz 3 Phase CE Marked
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