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TEL TOKYO ELECTRON TE 5480 Nitride Plasma Reactive Ion Etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL TOKYO ELECTRON TE 5480 Nitride Plasma Reactive Ion Etch. This TEL TOKYO ELECTRON TE 5480 Nitride Plasma Reactive Ion Etch is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this Nitride Plasma Reactive Ion Etch and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


TEL TOKYO ELECTRON TE 5480 Equipment Details

SDI ID: 2181
Manufacturer: TEL TOKYO ELECTRON
Model: TE 5480
Description: Nitride Plasma Reactive Ion Etch
Version: 150 mm
Vintage: 01.12.1992
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price (each): 19,000 USD
Comments:

Tokyo Electron
TE-5480
Nitride etcher
s/n 4K2279
Deinstalled: 25-Nov-1998
Vintage: 21-dec-1992
Components included:
1.Mainframe.
Configured for dual loading of 6 inch cassettes.
Singel nitride fitted process chamber
MFC Configuration:-
STEC 4400MC N2 200 sccm
STEC 4400MC O2 100 sccm
STEC 4400MC SF6 200 sccm
STEC 4400MC He 1 slm
STEC 4400MC CF4 200 sccm
STEC 4400MC CHF3 200 sccm
TYLAN PV104C He 20 slm
Daihen Dauma 10SA with Daihen UIM-1-T1 display unit
TYLAN PC73 HeLIUM BACK PRESSURE MONITOR

2.Electronics rack
3.Turbo pump. Seiko Seki MG-STPH600C-T52A
4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption.

6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M
7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height).
8. Chiller SMC Model INR-341-61A Triple Chiller
Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height).
-Deinstalled, warehoused.
-In working condition
-See photos for details
-Available for immediate consignment
-Can be inspected by appointment
-Located in Avezzano 67051 Italy

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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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