SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials P5000 CVD System, 2 Chamber TEOS Oxide CVD.
Please click on the "Send More Details" button at the end of the P5000 description, if you'd like to get more details, photos and specifications of this CVD System, 2 Chamber TEOS Oxide CVD, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials P5000 CVD System, 2 Chamber TEOS Oxide CVD is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||CVD System, 2 Chamber TEOS Oxide CVD|
REPORT ON THE REFURBISHMENT MADE ON THE P5000
The objective of the work was centered in two steps:check of the missing parts on the mainframe components:cassette indexer-LLC-wafer transfer chamber,both chambers C and D,major electronic PCBs(looking for their power and signal connecting cables) and the support equipments.
Missing parts:nothing to point out.
Cassette Indexer:check of the rotary actuator,optical sensor,speed control valve,air lines,window crank and turnbuckle,status of the cassette I/O window (plexiglas).
Note:this component of the mainframe has all the items present for its proper operation.
LLC Chamber:control of the wafer storage elevator,control of the physical presence of the centerfinder board,I/O slit valve.
Note:everything is present.
Wafer transfer chamber:from the upper side:check wafer sensor and LED emitter,transfer robot,chambers slit valves and from the bottom:check of the actuactors(particularly look for the presence of air lines close and open,reed switch magnetic,pneumatic cylinder),lower part of the robot(essentially extension and optical sensors,flag,rotation and extension motor,rotation pulley,drive belt,winder gear.
Note:this important component of the system has all the parts in there.
Chamber C and D:all the process chambers have been open.They were in bad conditons due to the fact that they did not undergo the required decontamination process when a tool has been turned off in the manufacturing environment. Hazardous cleaning effort has been performed.All the process kits are present.The susceptor and its assembly status are pretty good but the susceptor would need a further reconditioning process before being able to hold a wafer for process. Dismantle and re-install of the lamp module,the RF matching box.
Note:both process chambers present no defects.
Major electronic subsystems:check of the presence of the pcbs on the system controller and system electronic rack.
Conclusion:the gas panel has been only clean and the gas line well fixed in the gas panel box.At the end,all the P5000 underwent a cleaning process.The tool is ready for being shipped.
CAN BE OFFERED "AS IS" OR COMPLETELY REBUILT TO YOUR SPECIFICATIONS
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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