|Description:||Fully Automatic Dicing Saw|
|Sales Condition:||as is where is|
Application: Dicing/Cutting/Slotting various wafers, X-axis Section: Drive Method AC Servo Motor-ball Screw, Minimum Stroke 652mm (25.7") (end to end), Set-up Cut Stroke 220mm (8.7"), Cut Speed 0.7~3000mm/sec (0.0028 to 11.8" /sec) (Programmable), Y-axis Section: Drive Method AC Servo Motor-ball Screw, Maximum Stroke 250mm(9.8") (end to end), Set-up Cut Stroke 200mm(8.7"), Min Index Step 0.001mm (0.00004"), Single Pitch Error ?0.003mm(0.00012"), Cumulative Pitch Error ±0.005mm/200mm (±0.0002"/7.9") or less, The Zero Point Position ±0.001mm(±0.00004"), Index Speed 30mm/sec, Indexing Method Linear Scale Closed Loop System, Indexing Accuracy Single Pitch 0.003mm, Cumulative Pitch 0.005mm/200mm, y-axis Section: Drive Method Pulse Motor-Triangular Screw, Maximum Stroke 25mm(0.98"), Minimum Step 0.001mm(0.00004"), Indexing Method Linear Scale Closed Loop System, Z-axis Section (Z1,Z2-axis : DFD-3D/8, Z1-axis : DFD-3S/8): Drive Method Pulse Motor-ball Screw, Maximum Stroke 25mm(0.98"), Minimum Step 0.001mm(0.00004"), Indexing Method Rotary Encorder, ?-axis Section: Drive Method AC Servo Motor-harmonic Gear, Rotation Angle (end to end) 150 ? (end to end), Accuracy of Determining a Position ±2sec, Min Index Angle 1.62", Spindle Section: Method High Frequency Air Spindle, Output 2.2kW, RPM 3,000 ~ 40,000 (Programmable), Spinner Section (DFD-3D/8 ,3S/8): Wash Method High-pressure jet spinner washing system, Dry Method Air (N2) or Spinner Rotation System, Drive Method AC Servo Motor-Direct Drive, RPM 3,000 rpm MAX, Process Wash ? Rinse ? Dry, Wash/dry Time 600 Sec Maximum, Accuracy of Table Positioning, During Rotation ± 1 ?, Alignment Section: Alignment Method CCD Camera Pattern Matching System (DFD-3D/8 , 3S/8), Microscope Single Object Magnfication (a b Selectable), Objective lens (a 2.66(Macro) X 7.5(Micro) X 1.4 X D, b 7.08(Macro) X 19.88(Micro) X 3.8 X D) With Auto Focus Mechanism, Handling Section: Method Combination of Cross-flow Robot Arm Systemand Cassette Elevator, Application Frames 2, Cassette Pitch 1/4" or 3/16", Supply: Power 3 Phase 50/60 Hz, AC 200/220 V, 5 KVA (AC 200 ~ 415V Transformer Necessary), Cooling Water (tap Water) 2Kg/??G 4.5 Liters/Min (28.4 psi?G1.19 gpm), D.I Water (Cutting/Washing) 4Kg/??G 9 Liters/Min (56.8 psi?G 2.38 gpm), Air Pressure 5.5kgf/? ?G 600 Liters/Min (78.1 psi?G 158 gpm), N2 5.5kgf/? ?G 150 Liters/Min (78.1 psi?G 39.6 gpm), Machine Size (WxDxH) 1,830 x 1,100 x 1,655mm (72x43x65") including monitor but excluding projection, Machine Weight 1500kg (3370 lbs)
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