|Description:||Fully Automatic Dicing Saw|
|Sales Condition:||as is where is|
Application: Dicing/Cutting/Slotting various wafers, X-axis Section: Drive Method AC Servo Motor-ball Screw, Minimum Stroke 652mm (25.7") (end to end), Set-up Cut Stroke 220mm (8.7"), Cut Speed 0.7~3000mm/sec (0.0028 to 11.8" /sec) (Programmable), Y-axis Section: Drive Method AC Servo Motor-ball Screw, Maximum Stroke 250mm(9.8") (end to end), Set-up Cut Stroke 200mm(8.7"), Min Index Step 0.001mm (0.00004"), Single Pitch Error ?0.003mm(0.00012"), Cumulative Pitch Error ±0.005mm/200mm (±0.0002"/7.9") or less, The Zero Point Position ±0.001mm(±0.00004"), Index Speed 30mm/sec, Indexing Method Linear Scale Closed Loop System, Indexing Accuracy Single Pitch 0.003mm, Cumulative Pitch 0.005mm/200mm, y-axis Section: Drive Method Pulse Motor-Triangular Screw, Maximum Stroke 25mm(0.98"), Minimum Step 0.001mm(0.00004"), Indexing Method Linear Scale Closed Loop System, Z-axis Section (Z1,Z2-axis : DFD-3D/8, Z1-axis : DFD-3S/8): Drive Method Pulse Motor-ball Screw, Maximum Stroke 25mm(0.98"), Minimum Step 0.001mm(0.00004"), Indexing Method Rotary Encorder, ?-axis Section: Drive Method AC Servo Motor-harmonic Gear, Rotation Angle (end to end) 150 ? (end to end), Accuracy of Determining a Position ±2sec, Min Index Angle 1.62", Spindle Section: Method High Frequency Air Spindle, Output 2.2kW, RPM 3,000 ~ 40,000 (Programmable), Spinner Section (DFD-3D/8 ,3S/8): Wash Method High-pressure jet spinner washing system, Dry Method Air (N2) or Spinner Rotation System, Drive Method AC Servo Motor-Direct Drive, RPM 3,000 rpm MAX, Process Wash ? Rinse ? Dry, Wash/dry Time 600 Sec Maximum, Accuracy of Table Positioning, During Rotation ± 1 ?, Alignment Section: Alignment Method CCD Camera Pattern Matching System (DFD-3D/8 , 3S/8), Microscope Single Object Magnfication (a b Selectable), Objective lens (a 2.66(Macro) X 7.5(Micro) X 1.4 X D, b 7.08(Macro) X 19.88(Micro) X 3.8 X D) With Auto Focus Mechanism, Handling Section: Method Combination of Cross-flow Robot Arm Systemand Cassette Elevator, Application Frames 2, Cassette Pitch 1/4" or 3/16", Supply: Power 3 Phase 50/60 Hz, AC 200/220 V, 5 KVA (AC 200 ~ 415V Transformer Necessary), Cooling Water (tap Water) 2Kg/??G 4.5 Liters/Min (28.4 psi?G1.19 gpm), D.I Water (Cutting/Washing) 4Kg/??G 9 Liters/Min (56.8 psi?G 2.38 gpm), Air Pressure 5.5kgf/? ?G 600 Liters/Min (78.1 psi?G 158 gpm), N2 5.5kgf/? ?G 150 Liters/Min (78.1 psi?G 39.6 gpm), Machine Size (WxDxH) 1,830 x 1,100 x 1,655mm (72x43x65") including monitor but excluding projection, Machine Weight 1500kg (3370 lbs)
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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