SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Formula Vertical Nitride Furnace.
Please click on the "Send More Details" button at the end of the Formula description, if you'd like to get more details, photos and specifications of this Vertical Nitride Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Formula Vertical Nitride Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 53262 |
|---|---|
| Manufacturer: | TEL |
| Model: | Formula |
| Description: | Vertical Nitride Furnace |
| Version: | 300mm |
| Vintage: | Inquire |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price: | 375,000 USD |
| Comments: | Manufacturer : TEL
Model : Formula - Nitride
Equipment Type : Vertical Nitride Furnace
Equipment Number : 111263
Manufacturer Date : 10/1/2003
Cycles/Hours : 0 Hours
Description:
Currently installed and operational.
Deinstall scheduled for February 2008.
Furnace Formula 1-Tube Thin Nitride
Conversion to Hafnium Oxide Sept. 2006:
Includes the following:
- Reactor Module
- Buffer Module
- Load Port System
- Controller Module
- Process Exhaust Module
- Gas Cabinet
- Floor Box
- Power Box
- Ultra Clean Heater Chamber
- Power Supply System with Transformers and Breakers
- Main Tube Controller (Waves)
- Temperature Controller (M780)
Automations for Wafer and Cassette Handling
- Boat Elevator
- Wafer Transfer (5 wafer transfer)
- Wafer Counter
- Auto Tube Shutter
- FOUP Transfer
- Cassette Transfer
- Auto Tube Shutter
- 4 Stage Stocker
- FIMS Port with Door Opener
- FOUP ID Reader
Integrated Gas System for Thin Nitride Process
Vacuum Foreline with Pressure Controller
N2 Load Lock
- O2 Density Monitor in the Loading Area
- N2 Gas System
Filters for Clean Air Flow
Signal Tower
Complete Set of Quartzware
Wafer Folk(5pcs,Al2O3)
Inner Thermo Couple
S2-0200E Compatible Safety
Conversion to 50 wafer boat December 2003:
Modification
-TELFORMULA50
Wafer boat conversion
-Auto mechanism related engineering
Quartz boat (61 slots)
-Software related engineering
System parameter
Conversion to Hafnium Oxide Sept. 2006:
Modification Kit
-Furnace Related Items
-Replace SCV Shutter
Includes the following:
Gas Related Items
- Add Injector for TDMAH
- Add Injector Block heater on TDMAH line
- Modify IGS on TDMAH line
- Replace outside piping
- Remove TMA bubbler
- Replace VEC controller to Multi PID type
- Remove TL2009 vaporizer (keep signals)
- Add MFM to the V.Vent Line
- Remove Hand Valve from TDMAH
- Enlarge Hf piping diameter to 3/8"
- Add Parker valve with 3/8" inlet
Control Related item
- Replace Gas Flow Chart Panel
- Replace I/L ROM
- Replace Signal Cables
Software Related Item
- Change I/O assignment
- Change software I/L
Add TDMAH ampoule temperature monitoring/logging
and heating for large ampoule.
Add TDMAH gas line temperature monitoring/logging
and heating
Add TDMAH baratron monitoring/logging and heating
Add TDMAH Liquid level indication |
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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