TEL Formula Vertical Nitride Furnace for Sale

Manufacturer : TEL Model : Formula - Nitride Equipment Type : Vertical Nitride Furnace Equipment Number : 111263 Manufacturer Date : 10/1/2003 Cycles/Hours : 0 Hours Description: Currently installed and operational. Deinstall scheduled for February 2008. Furnace Formula 1-Tube Thin Nitride Conversion to Hafnium Oxide Sept. 2006: Includes the following: - Reactor Module - Buffer Module - Load Port System - Controller Module - Process Exhaust Module - Gas Cabinet - Floor Box - Power Box - Ultra Clean Heater Chamber - Power Supply System with Transformers and Breakers - Main Tube Controller (Waves) - Temperature Controller (M780) Automations for Wafer and Cassette Handling - Boat Elevator - Wafer Transfer (5 wafer transfer) - Wafer Counter - Auto Tube Shutter - FOUP Transfer - Cassette Transfer - Auto Tube Shutter - 4 Stage Stocker - FIMS Port with Door Opener - FOUP ID Reader Integrated Gas System for Thin Nitride Process Vacuum Foreline with Pressure Controller N2 Load Lock - O2 Density Monitor in the Loading Area - N2 Gas System Filters for Clean Air Flow Signal Tower Complete Set of Quartzware Wafer Folk(5pcs,Al2O3) Inner Thermo Couple S2-0200E Compatible Safety Conversion to 50 wafer boat December 2003: Modification -TELFORMULA50 Wafer boat conversion -Auto mechanism related engineering Quartz boat (61 slots) -Software related engineering System parameter Conversion to Hafnium Oxide Sept. 2006: Modification Kit -Furnace Related Items -Replace SCV Shutter Includes the following: Gas Related Items - Add Injector for TDMAH - Add Injector Block heater on TDMAH line - Modify IGS on TDMAH line - Replace outside piping - Remove TMA bubbler - Replace VEC controller to Multi PID type - Remove TL2009 vaporizer (keep signals) - Add MFM to the V.Vent Line - Remove Hand Valve from TDMAH - Enlarge Hf piping diameter to 3/8" - Add Parker valve with 3/8" inlet Control Related item - Replace Gas Flow Chart Panel - Replace I/L ROM - Replace Signal Cables Software Related Item - Change I/O assignment - Change software I/L Add TDMAH ampoule temperature monitoring/logging and heating for large ampoule. Add TDMAH gas line temperature monitoring/logging and heating Add TDMAH baratron monitoring/logging and heating Add TDMAH Liquid level indication

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