SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Formula Vertical Nitride Furnace.
Please click on the "Send More Details" button at the end of the Formula description, if you'd like to get more details, photos and specifications of this Vertical Nitride Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Formula Vertical Nitride Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Vertical Nitride Furnace|
|Sales Condition:||as is where is|
|Sales Price (each):||375,000 USD|
Manufacturer : TEL Model : Formula - Nitride Equipment Type : Vertical Nitride Furnace Equipment Number : 111263 Manufacturer Date : 10/1/2003 Cycles/Hours : 0 Hours Description: Currently installed and operational. Deinstall scheduled for February 2008. Furnace Formula 1-Tube Thin Nitride Conversion to Hafnium Oxide Sept. 2006: Includes the following: - Reactor Module - Buffer Module - Load Port System - Controller Module - Process Exhaust Module - Gas Cabinet - Floor Box - Power Box - Ultra Clean Heater Chamber - Power Supply System with Transformers and Breakers - Main Tube Controller (Waves) - Temperature Controller (M780) Automations for Wafer and Cassette Handling - Boat Elevator - Wafer Transfer (5 wafer transfer) - Wafer Counter - Auto Tube Shutter - FOUP Transfer - Cassette Transfer - Auto Tube Shutter - 4 Stage Stocker - FIMS Port with Door Opener - FOUP ID Reader Integrated Gas System for Thin Nitride Process Vacuum Foreline with Pressure Controller N2 Load Lock - O2 Density Monitor in the Loading Area - N2 Gas System Filters for Clean Air Flow Signal Tower Complete Set of Quartzware Wafer Folk(5pcs,Al2O3) Inner Thermo Couple S2-0200E Compatible Safety Conversion to 50 wafer boat December 2003: Modification -TELFORMULA50 Wafer boat conversion -Auto mechanism related engineering Quartz boat (61 slots) -Software related engineering System parameter Conversion to Hafnium Oxide Sept. 2006: Modification Kit -Furnace Related Items -Replace SCV Shutter Includes the following: Gas Related Items - Add Injector for TDMAH - Add Injector Block heater on TDMAH line - Modify IGS on TDMAH line - Replace outside piping - Remove TMA bubbler - Replace VEC controller to Multi PID type - Remove TL2009 vaporizer (keep signals) - Add MFM to the V.Vent Line - Remove Hand Valve from TDMAH - Enlarge Hf piping diameter to 3/8" - Add Parker valve with 3/8" inlet Control Related item - Replace Gas Flow Chart Panel - Replace I/L ROM - Replace Signal Cables Software Related Item - Change I/O assignment - Change software I/L Add TDMAH ampoule temperature monitoring/logging and heating for large ampoule. Add TDMAH gas line temperature monitoring/logging and heating Add TDMAH baratron monitoring/logging and heating Add TDMAH Liquid level indication
Send Me More Details about this item.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
Established in 1998, SDI has now built up an international network of sales agents and offices.
SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.
Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.
Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America
SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.
Request monthly equipment news
We'd love to get your feedback about our website and our services!
Fill in the Feedback Form