SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Formula Vertical Oxide Furnace.
Please click on the "Get Quote" button at the end of the Formula description, if you'd like to get a quotation, photos and specifications of this Vertical Oxide Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Formula Vertical Oxide Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Vertical Oxide Furnace|
Manufacturer : TEL Model : Formula - Oxide Equipment Type : Vertical Oxide Furnace Equipment Number : 114391 Manufacturer Date : 8/1/2004 Cycles/Hours : 0 Hours Description: TEL Formula-1 HV 300mm AlO/HfO Furnace* Currently Installed and Operational* 1.Base Unit for AlO/HfO Process* Including:* TEL FORMULA Standard Layout with the following cabinets:* -Reactor Module* -Buffer Module* -Load Port* -Controller Module* -Process Exhaust Module* -Gas Cabinet* -Floor Box* -Power Box* -Ultra Clean Heater Chamber* -Power Supply System with Transformers and Breakers* -Main tube Controller (WAVES)* -Temperature Controller (M780)* -Vacuum Foreline with Pressure Controller* Automations for Water and Cassette Handling * -Boat Elevator* -Wafer Transfer (5 wafer transfer)* -Wafer Counter* -FOUP Transfer* -Cassette Transfer* -Auto Tube Shutter* -4 Stage Stocker* -FIMS Port with Door Opener* -FOUP ID Reader* -Filters for Clean Air Flow* -Wafer Folk (5pcs, Al2O3)* -Signal Tower* -S2-0200 Compatible Safety* 2.AlO/HfO Process Specific Option* Integrated Gas System for Al2O3/HfO process* -O2 gas line* Bubbler system for TMA precursor* Vaporizer system for TDEAH precursors* Ozonizer* N2 Load Lock* -O2 Density Monitor in the Loading Area* -N2 Gas System*
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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