SDI fabsurplus.com is pleased to announce the availability of the following listed used Roth & Rau SiNA Plus PECVD - Deposition of Silicon Nitride.
Please click on the "Send More Details" button at the end of the SiNA Plus description, if you'd like to get more details, photos and specifications of this PECVD - Deposition of Silicon Nitride, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Roth & Rau SiNA Plus PECVD - Deposition of Silicon Nitride is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||Roth & Rau|
|Description:||PECVD - Deposition of Silicon Nitride|
|Version:||156 mm SQUARE/125 MM|
|Sales Condition:||as is where is|
|Sales Price (each):||Inquire|
Currently Deinstalled and warehoused in Temple, TX, USA.
PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H Approximate capacity of 1,200 156mm x 156mm wafers per hour each.
· Located in USA
· Operational until taken out of service in 2012
· Manufacturer: Roth & Rau Model - SiNa Plus
· Megawatt production: 30MW
· Material: Poly Silicon (Multi Crystalline Silicon)
· Process: Ammonia & Silane Gas
· Wafer Size: 125mm and/or 156mm Square
· Ammonia gas panel and Ammonia fume scrubber
· Lines are complete with:
· Loader, Unloader, conveyor, changer and process unit.
Roth & Rau Silicon Nitride Line: Roth & Rau SiNA Plus Lot: PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H; 480V AC; 3ph; Current 400A; Line Frequency 60 Hz; Operation and Maintenance Manual. Includes (1) ATS # 1815, SiN 1 Loader w/ Allen-Bradley PanelView 600 controller. 19'L x 11'W x 7'H; 480V AC; 3ph; Cur-rent 30A; Line Frequency 60Hz; Operation Manual included (2005).
Send Me More Details about this item.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
Established in 1998, SDI has now built up an international network of sales agents and offices.
SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.
Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.
Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America
SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.
Request monthly equipment news
We'd love to get your feedback about our website and our services!
Fill in the Feedback Form