SDI fabsurplus.com is pleased to announce the availability of the following listed used Roth & Rau SiNA Plus PECVD - Deposition of Silicon Nitride. This Roth & Rau SiNA Plus PECVD - Deposition of Silicon Nitride is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this PECVD - Deposition of Silicon Nitride and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Manufacturer:||Roth & Rau|
|Description:||PECVD - Deposition of Silicon Nitride|
|Version:||156 mm SQUARE/125 MM|
|Sales Condition:||as is where is|
|Sales Price (each):||Inquire|
Currently Deinstalled and warehoused in Temple, TX, USA.
PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H Approximate capacity of 1,200 156mm x 156mm wafers per hour each.
· Located in USA
· Operational until taken out of service in 2012
· Manufacturer: Roth & Rau Model - SiNa Plus
· Megawatt production: 30MW
· Material: Poly Silicon (Multi Crystalline Silicon)
· Process: Ammonia & Silane Gas
· Wafer Size: 125mm and/or 156mm Square
· Ammonia gas panel and Ammonia fume scrubber
· Lines are complete with:
· Loader, Unloader, conveyor, changer and process unit.
Roth & Rau Silicon Nitride Line: Roth & Rau SiNA Plus Lot: PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H; 480V AC; 3ph; Current 400A; Line Frequency 60 Hz; Operation and Maintenance Manual. Includes (1) ATS # 1815, SiN 1 Loader w/ Allen-Bradley PanelView 600 controller. 19'L x 11'W x 7'H; 480V AC; 3ph; Cur-rent 30A; Line Frequency 60Hz; Operation Manual included (2005).
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