Roth & Rau SiNA (Spare Parts) Spare Parts from PECVD system for deposition of Silicon Nitride for Sale

Roth & Rau SiNA Plus - Component

Quantity

Manual

AEG_thyristor_typ_3A

1

Yes

AEG_thyristor_typ1A&2A

1

Yes

DEUBLIN_rotary_water_feedthrough_55

1

Yes

ELERO_Compakt_EN

1

Yes

ELERO_IBN-Compakt

1

Yes

ELERO_Vario_EN

1

Yes

EUCHNER_CMS-E-BR

1

Yes

EUROTHERM_2408_manual

1

Yes

EUROTHERM_2408_Profibus

1

Yes

FESTO_CRVZS_Air-Reservoirs

1

Yes

FESTO_DNC_gate pneumatic cylinder

1

Yes

FESTO_JMFH_gate control valve

1

Yes

FESTO_MS-series_Maint.unit

1

Yes

FESTO_PEV_pressure switch

1

Yes

FESTO_valve_terminal_1

1

Yes

FESTO_valve_terminal_2

1

Yes

HELIOS_RR_90521_0501_EN

1

Yes

HELIOS_UK_158_159_EN

1

Yes

HERAEUS_Heater_40kW

1

Yes

IFM-PN7009

1

Yes

IFM-SI1000 (short)

1

Yes

IFM-SI1000

1

Yes

JUMO_TB-TW

1

Yes

LEISTER_MW-blower

1

Yes

LENZE_9300_Servo_Position_controller

1

Yes

LENZE_9300_Servo_Positioning_Controller

1

Yes

LENZE_9300_Servo_Positioning_Controller_v2-3_EN

1

Yes

LENZE_Frequency_inverters_8220_8240

1

Yes

LENZE_Frequency_inverters_8220_8240_0702_EN

1

Yes

MKS_Baratron_627b

1

Yes

MKS_Baratron627b_eng

1

Yes

MKS_MFC_1179

1

Yes

MKS_MFC1179B_eng

1

Yes

MUEGGE_MX016KG-110KL

1

Yes

P+F_M5-MV5-32-115_(OBE5000-F28-SE5)

1

Yes

P+F_OBE10M-18GM60-SE5-V1_(OBE5000-18GM70-SE5-V1)

1

Yes

PFEIFFER_angle_valve_EVB160_EN_complete

1

Yes

PFEIFFER_angle_valve_EVB160_EN_short

1

Yes

PFEIFFER_gauge_PKR251

1

Yes

PFEIFFER_gauge_TPR280

1

Yes

PILZ_PNOZ X4

1

Yes

R&R_area heater_RR-3X400-8K1+RR-3X400-10K2_ENG

1

Yes

R&R_Plasma Source Manual

1

Yes

R&R-area-heater

1

Yes

SIEMENS_S7-300_AI_SM331

1

Yes

SIEMENS_S7-300_AO_SM332

1

Yes

SIEMENS_S7-300_DO_SM322

1

Yes

SIEMENS_S7-300_IHB_e

1

Yes