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Kokusai DD-803V Vertical furnace, PYRO process for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Kokusai DD-803V Vertical furnace, PYRO process. This Kokusai DD-803V Vertical furnace, PYRO process is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this Vertical furnace, PYRO process and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Kokusai DD-803V Equipment Details

SDI ID: 60932
Manufacturer: Kokusai
Model: DD-803V
Description: Vertical furnace, PYRO process
Version: 150 mm
Vintage:
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 120,000 USD
Comments:

 

Process

Used process gas

N2, H2, O2, DCE

Hook - up status

CONTROLL POWER ON / GAS LINE CLOSE / EXHAUST CLOSE

S/W Back-up

Back-up data

MAIN COMTROLLER CX 3002 

 

 

Power 사양

Heater power

3Φ AC200V 42KVA

Control power

1Φ AC100V 30A

Clean unit power

1Φ AC100V 40A

ETC

DCE POWER 1Φ AC100V 5A

 

 

 

 

Loading System

Operation pannel /후 유무

전면 有 / 후면 無

Pass box (Load lock) 유무

CASSETTE LOADER :

Main controller model

CX 3002

Mecha controller model

CX 1220

Wafer counter 유무/가능매수

6" 25

I/O Stage check

AIR OFF로 육안 CHECK

Cassette loader check

CX 3002 로 육안 CHECK

Wafer transfer check

AIR OFF로 육안 CHECK (6" VACUUM TWEEZER 사용 5)

 

 

Furnace System

Temp controller model

CQ 1500 (DN-150)

Heater model / Serial number

D4EX 05414 

Profile T/C (/외장) Status

SIC PROFILE T/C 有 외관 GOOD

Control T/C status

4EA 외관 GOOD

Monitor T/C status

4EA 외관 GOOD

 

 

Gas System

MFC Controller model

CX 1311

MFC Maker ( STEC       )

MFC1: MISSING

MFC2: H2 20SLM

MFC3: O2 20SLM

Model / Gas / 유량

MFC4: O2 2SLM

MFC5: N2 1SLM

MFC6: NA

MFM 사양 (Gas,유량)

MFM1: N2 10SLM

MFM2: NA

MFM3: NA

Filter model / 수량

2 EA

Pressure Control System

Pressure controller model

AERA RC-100F

Valve open/close check

APC VALVE AERA RV-100

Press gauge model

(Pirani , Baratron)

NA

 

Burning System

Burn controller model

CX 1310

Burn system check

GAS OFF로 육안 CHECK GOOD

Lamp on check (Temp reading)

MAIN COMTROLLER CX 3002 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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