|Version:||100 mm to 200 mm|
|Sales Condition:||as is where is|
Handler Type H2
Handler option 100mm - 200mm Open Cassette
Measurement Range 5mΩ/sq - 5MΩ/sq
Repeatability (VLSI) < 0.2% (1σ)
Accuracy (VLSI) ±1%
Edge Exclusion 3mm from edge of film
Temperature Accuracy n/a
Temperature Repeatability n/a
Throughput (5-site) 3.5 - 4.5s per Site
Alignment System Pre-Aligner
Factory Automation Basic SECSII
Computer OS DOS
Computer Configuration 486
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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