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This item has been sold - KLA-Tencor RS-35A RESISTIVITY MEASUREMENT for Sale



KLA-Tencor RS-35A Details

SDI ID: 64089
Manufacturer: KLA-Tencor
Model: RS-35A
Description: RESISTIVITY MEASUREMENT
Version: 100 mm to 200 mm
Vintage:
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:

Handler Type              H2

Handler option                        100mm - 200mm Open Cassette

Measurement Range              5mΩ/sq - 5MΩ/sq

Repeatability (VLSI)    < 0.2% (1σ)

Accuracy (VLSI)                       ±1%

Edge Exclusion                        3mm from edge of film

Temperature Accuracy           n/a

Temperature Repeatability    n/a

Throughput (5-site)     3.5 - 4.5s per Site

Alignment System                   Pre-Aligner

Factory Automation    Basic SECSII

Computer OS                          DOS

Computer Configuration         486


Attachments: 8 Files


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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