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KOKUSAI DD-823V-8PL H2 Anneal, SMIF for Sale


fabsurplus.com is pleased to announce the availability of the following listed used KOKUSAI DD-823V-8PL H2 Anneal, SMIF. This KOKUSAI DD-823V-8PL H2 Anneal, SMIF is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this H2 Anneal, SMIF and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


KOKUSAI DD-823V-8PL Equipment Details

SDI ID: 64191
Manufacturer: KOKUSAI
Model: DD-823V-8PL
Description: H2 Anneal, SMIF
Version: 200 MM
Vintage: 01.06.1997
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:
DD823V (SMIF)
1) GENERAL CONFIGURATION
Safety Specification: KE Standard
System Layout Type: 200mm configuration
System Paint Color: Biege white
System Power Rating: AC200V 3P / AC100V 1P
Loading Configuration: 4 Loader / 170 Wafer Slots
Process Pressure (Torr): ATM
Process Temperature (ºC): 400
FTP Heater: Installed
Heater Type: Middle Temp

2) PROCESS GASES
Process Gas MFC1 N2
Process Gas MFC2 H2
3) GAS DISTRIBUTION SYSTEM
Basic Style Integrated Gas System (Fujikin)
Tubing Material Stainless Steel
Tubing Finish Electro-polished
Tubing Bends Mechanical Bends OK
Manual Valve Fujikin
Air-Operated Valve Fujikin
Filter Millipore
Regulator Fujikin
MFC AERA
Press. Transducer MKS
Press. Transducer Display Reference Compound
External Torch Unit Std Flow Torch
Gas System Schem. Dwg / Parts List KE Supplied
Panel Heater for Furnace Opening N/A
Exhaust controller system: STEC EC-3300
Attachments: 0 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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