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Novellus Speed C2 CVD TRIPLE CHAMBER for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus Speed C2 CVD TRIPLE CHAMBER.
Please click on the "Send More Details" button at the end of the Speed C2 description, if you'd like to get more details, photos and specifications of this CVD TRIPLE CHAMBER, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus Speed C2 CVD TRIPLE CHAMBER is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Novellus Speed C2 Equipment Details

SDI ID: 66400
Manufacturer: Novellus
Model: Speed C2
Description: CVD TRIPLE CHAMBER
Version: 200 mm
Vintage: 01.06.2000
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 550,000 USD
Comments:

NOVELLUS     CONCEPT 2 SPEED   

Triple Chamber, MAG 2000, 8",2000, 3C/H 

 

Novellus Speed C2-Specifications

Item

Value

DLCM model name

C2-DLCM-S

DLCM serial number

-

DLCM Type

Rorze Type

Indexer controller

Animatics

Loadlock pressure gauge Tylan 10torr baratron

 

Loadlock slit valve

SMC

Loadlock purge MFC

 

Transfer robot

MAG 7

Robot arm

Dual arm

Process module slit valve

SMC

Transfer pressure gauge Tylan 10torr baratron

 

Transfer throttle valve

MKS

Turbo pump

Pfeiffer TMH260

Module cotroller

MC1

IOC

V 4.1

Front UI

New Type

Power Config

Main & UPS

SystemController

MC1

SSD Type

MSSD

IOC #3 Version

V 4.1

Item

Chamber A

Chamber B

Chamber C

Module Model Name

 

SPD-S

 

Module Serial Number

 

 

 

Turbo Pump

 

LEYBOLD W2000

 

Turbo Pump Controller

 

LEYBOLD MAG 2000 DRIVE

 

Module Controller

 

MC1

 

IOC Version

 

V 4.1

 

MFC Type

 

 

 

UPC Type

 

MKS

 

Pressure Gauge(10T/20T)

MKS

MKS

MKS

ESC power supply

NTM500

NTM500

NTM500

RF match

Trazer

Trazer

Trazer

Throttle Valve

MKS

MKS

MKS

HF Generator

 

AE/RFG 5500

 

LF Generator

 

AE/PDX 5000

 

 

 

 

 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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