fabsurplus.com




Canon FPA 5000 ES2+ 248 nm lithography exposure system for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Canon FPA 5000 ES2+ 248 nm lithography exposure system.
Please click on the "Send More Details" button at the end of the FPA 5000 ES2+ description, if you'd like to get more details, photos and specifications of this 248 nm lithography exposure system, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Canon FPA 5000 ES2+ 248 nm lithography exposure system is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Canon FPA 5000 ES2+ Equipment Details

SDI ID: 68025
Manufacturer: Canon
Model: FPA 5000 ES2+
Description: 248 nm lithography exposure system
Version: 200 mm (300 mm also possible with conversion kit)
Vintage: 01.06.2000
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 220,000 USD
Comments:
High NA covers 0.18 um to 0.15 um design rules using 248 KrF illumination. The wafer size can easily be changed between 200 mm and 300 mm with a simple conversion kit.
The Platform features a reaction force receiver on both the reticle and wafer stages. Active dampers are added to the wafer stage to prevent machine vibrations from occuring via the fab floor. This allows much higher exposure speeds.
The stage features frictionless air bearings and improved vibration isoltation. The wafer stage is of the new FLAT II design.
The bar mirrors are hollow and the tilt plate is constructed with beams.
This virtually eliminates mirror sag, and allows the stage weight for the 300 mm stage to remain about that of the previous models 200 mm stage.
The lenses are assembled using Ultima PM1 data to minimise aberrations.
 Deinstalled, warehoused
s/n 0096071
Alignment laser: Zygo Laser 6mm zygo p/n 8070-0102-05 Model 7702 Date March 2000 CE MARKED
12 SLOT RETICLE LIBRARY
Robot type 6735A
Power 200V 3 phase 2W, 1PE, 6.9 kva and 19.8 kva
main unit weight 12260 kg *Scanner and environmental chamber)
TCU 750 kg
Laser and delivery optics 1557 kg
Power box 100 kg
Reduction ratio 4:1
Resolution 0.15 um
illumination 248 nm (KrF)
Image field size 26 mm x 33 mm
reticle 6 inch square, 0.25 inch thickness
Alignment - TTL off axis imaging and off axis imaging overlay accuracy better than 35 nm
Through put better than 125 wph for 8 inch wafers
Main body dimensions 230 cm w x 325 cm d x 280 cm height.
Location: Warehoused in Boerne, TX 78006 USA
Categories:
Attachments: 13 Files
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us





View all Equipment owned by SDI for sale

View all FAB Litho Exposure for sale

Search for Canon items for sale

Search for FPA 5000 ES2+ items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form