This item has been sold - Axcelis Nv 8250 Medium Current Implanter for Sale

Axcelis Nv 8250 Details

SDI ID: 71257
Manufacturer: Axcelis
Model: Nv 8250
Description: Medium Current Implanter
Version: 200 mm
Vintage: 01.09.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
  • Tool in operational condition, major parts intact.


   Axcelis NV8250 Configuration for GSP
Vacuum system  
Cryo Compressor CTI-9600 X1 
Beamline Cryo pump 1 OB 8 (P3)
Process cryo 2, 3 OB 8 (P4,5)
Source Pump STP1003C (P1)
Beamline Turbo  pump STP301C (P2a), STP1003C (P2b)
Terminal Rough Pump Ebara pump 40x20  (RP1, RP2)
Endstation Rough Pump Ebara pump 50x20 (RP3 )
Vacuum controller HCIG
Endstation Info  
Cassette capability Two cassette
wafer size 200mm
wafer notch alignment Automatic Notch alignment capability
Wafer handling system In-Air/In-Vacuum High Throughput Wafer Handling System
Particle Filter system Class 1, UPLA Filtered Wafer Handling System
Implant angle capability Variable Implant Angle ( 45 deg tilt axis & 360 deg twist axis )( Quad Implant Capability )
Beam monitoring system Real-time patented Dose Control
  Real-Time Beam Profiller( single dimension )
Chuck Electro-Static Clamp
Chuck cooling interlock Y
Asyst LPT2200 smif Interface capability Y
Terminal Info  
Gas box Option Modular gas box
Four String Gas Box Options
- 1 High Pressure String
- 2 SDS string Hydride( Arsine and Phosphine )
- 1 SDS string Flouride( Boron Trifluoride )
- 3 Pressure Transducer on SDS string( per string ) -- PSIA
Mass Flow Controller :
- 1 kit Unit 1660
- 3 kits Unit 1662
Extraction PS 0 - 40KeV
Extraction voltage monitor Y
Vaporiser Y
Ion Source Eterna ELS( Extended Life Source )
Source bushing Extended life bushing
Source liner for Extended life bushing
Extraction Electrode 3-Axis Extraction Electrode
AMU system Triple Indexed Mass Analysis Magnet and Power Supply
Beam Shutter Y
Beamline Quads beam focus & Scanner Y
P-Lens PS 0 - 68KeV
Decel PS 0 - 40 KeV
Accel PS 0 - 142 KeV
Terminal transfomer Oil-cooled transformer
Angular Energy Filter Y
Energy Slit Y
Beam Profiler with P-cup Y
Flag faraday with side cups Y
Charge control Technology  
E-shower Y
Closed-Loop Cooling System Selection  
Cooling system Neslab/Affinity chiller
General Info  
Control UPS Y
Main Isolation transformer Y
Abatement system EGS237 Novapure
Software version 4.3.2
Smoke detector Y
Exhaust Flow switch Y
Water leakage sensor Y
Light Tower Y
Advanced Automation Package SUN SOLARIS Operator Workstation :
  Hard Drive, Tape Cartridge, 19" LCD Monitor
  SECS I and SECS II Protocols, GEM Interface and Ethernet Ports

Attachments: 6 Files

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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