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LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished) for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished).
Please click on the "Get Quote" button at the end of the A6 EXELAN description, if you'd like to get a quotation, photos and specifications of this OXIDE ETCHER (refurbished), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


LAM RESEARCH A6 EXELAN Equipment Details

SDI ID: 71831
Manufacturer: LAM RESEARCH
Model: A6 EXELAN
Description: OXIDE ETCHER (refurbished)
Version: Inquire
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:
  Fully Refurbished tool   
Overhauled & Refurbishment Service Details:
a. TM Module overhauled
b. Load Lock Overhauled (Including SMIF type)
c. Process Module Overhauled with PM#2,3,4
d. ESC Heater Overhauled
e. Process Kit Cleaning
F T.C., Bellows, Fitting for All new
g. MFC type: 1661 unit metal digital overhauled
h. Singal cable length
     TM to RPM 80 ft
     TM to Pump 80 ft
     PM to Gas Box 30 ft
     PM to Pump 80ft
     PM to TCU 70 ft
i. S/W Release: A2.1
J. System Power Dist: RPM, Stand, 208VAC, WYE
k. TCU Breaker Size: 40 amp TCU Breaker

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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