SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished).
Please click on the "Get Quote" button at the end of the A6 EXELAN description, if you'd like to get a quotation, photos and specifications of this OXIDE ETCHER (refurbished), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||OXIDE ETCHER (refurbished)|
|Sales Condition:||as is where is|
Fully Refurbished tool
Overhauled & Refurbishment Service Details:
a. TM Module overhauled
b. Load Lock Overhauled (Including SMIF type)
c. Process Module Overhauled with PM#2,3,4
d. ESC Heater Overhauled
e. Process Kit Cleaning
F T.C., Bellows, Fitting for All new
g. MFC type: 1661 unit metal digital overhauled
h. Singal cable length
TM to RPM 80 ft
TM to Pump 80 ft
PM to Gas Box 30 ft
PM to Pump 80ft
PM to TCU 70 ft
i. S/W Release: A2.1
J. System Power Dist: RPM, Stand, 208VAC, WYE
k. TCU Breaker Size: 40 amp TCU Breaker
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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