SDI fabsurplus.com is pleased to announce the availability of the following listed used Solitec 5110C Manually loading Photoresist Spin Coater .
Please click on the "Get Quote" button at the end of the 5110C description, if you'd like to get a quotation, photos and specifications of this Manually loading Photoresist Spin Coater , and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Solitec 5110C Manually loading Photoresist Spin Coater is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Manually loading Photoresist Spin Coater|
|Version:||3 to 9 inch|
|Sales Condition:||as is where is|
- Model: 5110C
Single Chuck Coater
The 5110C is a manual load/unload spinner with automatic resist dispensing, spin timing and a 2-speed spread control. The system dispenses a selected amount of resist at low spin speed. A high-speed spin stretches the resist to its final thickness. The quantity of resist dispensed, spindle speeds, dwell and spin times are all variable and can be selected in advance. This allows the user to achieve predictable results, time and time again. An exhaust fan is mounted under the process bowl to allow continuous exhaust flow around the process area. A side mounted belt drive motor with N2 purge, keeps solvents away from all moving parts. The Solitec diaphragm pump allows for accurate dispense volumes every time, and the adjustable teflon valve guarantees accurate and repeatable suckback.
Manual with loading paddle to center wafer
Pressurized tank required
Substrate Sizes (Max.)
9" round, 6" square, 9" diagonal rectangular
Digital readout from optical encoder
10 rpm resolution
Variable from 1,000 to 40,000 rpm/sec
Digital timers with manual programming
Variable from 1 to 999 seconds in 1 second increments
Automatic Teflon diaphragm pump with precise dispense
adjustment; 0.5 to 38 mlt1%; viscosity 4 to 10,000
centistokes; separate drawback adjustment
Closed loop servo with t10 rpm speed control
Adjustable from 200 to 10,000 rpm
Digital reference on spin and spread speeds
Standard Process Sequence
Resist coat (static or dynamic)
SYSTEM CONTROL PANEL
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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