SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-TENCOR AIT FUSION Dark Field WAFER PARTICLE DETECTION.
Please click on the "Get Quote" button at the end of the AIT FUSION description, if you'd like to get a quotation, photos and specifications of this Dark Field WAFER PARTICLE DETECTION, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-TENCOR AIT FUSION Dark Field WAFER PARTICLE DETECTION is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Dark Field WAFER PARTICLE DETECTION|
|Sales Condition:||as is where is|
Deinstalled in the fab.
Location: Japan. Inspection is available by appointment.
Config: Patterned Wafer Dark-field Defect Inspection tool
Serial Number 9314
Process Dark Field
Software Version 184.108.40.206 2.
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Cassette Port 1 Port Wafer Cassette 8 PP (Miraial: KM-803P-K)
3-1. Advanced Patterned Wafer Inspection System
Laser: Argon ion laser for 75mW(487.9nm) YES
Spot Size 10um, 5um, 3.5um
Microscope review Objectives 50x, 100x, 150x
Image Computer YES
Keyboard & Floppy Disk Drive YES
3-2. Wafer Handler 200mm Single Open Cassette Loader YES
Robot YES Prealigner YES
3-2. Blower Unit Blower YES
3-3. Option PSL 0.494um Wafer NO Caltile Wafer NO
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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