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KLA-TENCOR AIT UV Dark Field WAFER PARTICLE DETECTION for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-TENCOR AIT UV Dark Field WAFER PARTICLE DETECTION. This KLA-TENCOR AIT UV Dark Field WAFER PARTICLE DETECTION is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this Dark Field WAFER PARTICLE DETECTION and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


KLA-TENCOR AIT UV Equipment Details

SDI ID: 76681
Manufacturer: KLA-TENCOR
Model: AIT UV
Version: 200 mm
Vintage: 01.01.2003
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:
-Has had the laser power supply and the MMDs removed
-The MMDs and laser power supply have been replaced with the bad parts
-So, these parts need repair

Deinstalled, warehoused. Inspection is available by appointment. Config: Patterned Wafer Dark-field Defect Inspection (UV laser)
-Upgraded with 2.2 um pixel size

1.GENERAL INFORMATION Patterned Wafer Dark-field Defect Inspection (UV laser)
Tool ID AIT08
Serial Number 1039
Vintage 2003
OEM KLA-TENCOR
Model AITUV
Process Dark Field
Software Version 6.1.27.9
2.WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Cassette Port 2 Port
Wafer Cassette 8” PP (Miraial: KM-803P-K)
SMIF Interface NO
3. SYSTEM CONFIGURATION
3-1. Advanced Patterned Wafer Inspection System
Laser: UV laser for 90mW(364nm) YES
Spot Sizes 5um, 3.5um, 2.2um
Microscope review Objectives 50x, 100x, 150x
Computer YES
Image Computer YES
Keyboard & Floppy Disk Drive YES
3-2. Wafer Handler
200mm Dual Open Cassette Loader YES
Robot YES
Prealigner YES
3-2. Pillar Module
Pillar Module YES
3-3. Blower Unit
Blower YES
3-4. Option
PSL 0.494um Wafer NO
Caltile Wafer NO
200mm Dual Open Cassette Loader
Pillar Module
Blower Unit
Categories:
Attachments: 8 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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