SDI fabsurplus.com is pleased to announce the availability of the following listed used Lam 590 Etcher.
Please click on the "Get Quote" button at the end of the 590 description, if you'd like to get a quotation, photos and specifications of this Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Lam 590 Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
Oxide autoetcher remanufactured by Aspect Systems August 2000.
Configured for 6″ wafers.
Complete rebuild parameters upon request.
Gas configuration Ar 200sccm, O2 50sccm, He 200sccm, CHF3 100sccm,
Eni OEM-12 Rf generator,
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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