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Veeco VX310 Atomic Force Microscope for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Veeco VX310 Atomic Force Microscope.
Please click on the "Send More Details" button at the end of the VX310 description, if you'd like to get more details, photos and specifications of this Atomic Force Microscope, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Veeco VX310 Atomic Force Microscope is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Veeco VX310 Equipment Details

SDI ID: 78309
Manufacturer: Veeco
Model: VX310
Description: Atomic Force Microscope
Version: 200 mm / 300 mm
Vintage: 01.06.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 140,000 EUR
Comments:
-Exact model: Veeco / Digital Instruments Dimension VX Series DUVx310
-AFM Vx310 (with Brooks robot for 300 or 200mm wafers)
-Made by Veeco, serviced in Aug  2015 by Bruker. Circa 2004, operational.
-Voltage setup: 120 VAC 7.3 A
-CE marked
-Open cassette 300 mm wafer loading.
-Open cassette and FOUP loading for 200 mm wafers
-Through the wall fab layout.
-See attached recent photos for current condition
-Can be inspected by appointment.

-Dimension Vx Atomic force Profiler
-Model Vx310 is for automated production
-Applications include Etch depth, line depth, CMP, imaging, profiling and HSG
-excellent repeatability
-highest profiling resolution
-high scanning and 3D imaging speeds
-low contact forces and friction
-tapping mode eliminates destructive lateral forces
-Long scan (Up to 100 mm)
-Good step hight repeatability
-high lateral resolution

-Works well for depth metrology applications  e.g High aspect ratio features >10:1
-< 5 nm lateral resolution
-2 A RMS noise
-Sub 0.18 um plug, line and via measurement
-AFM scans up to 65 um x 65 um
-Throughput: 7 wph with 5 sites for profiles and 5 wph for images
-Automated tip exchange and management
-Sub-micron feature locator
-Pattern recognition for post-CMP features
-HSMS SEMI E30 GRM
CE/S2/S8 compliant

General specifications
-100mm profile stage
-1μm X-Y axis repeatability
-6μm vertical range
-<5Å static step height
-repeatability on 0.1μm and 1μm steps, (1σ); 20 traces at
-20μm/sec scan speed

Profiler mode
-262,000 data points/scan
-up to 100mm profile length
-up to 200μm/second scan speed

Imaging mode
-512 x 512 data points
-Up to 65μm square area scans
-Die scale imaging
-3D visualization and analysis software

Optics
-Dual optics with 150μm and 600μm viewing area
-Low magnification optics (3mm viewing area)
Categories:
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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