SDI fabsurplus.com is pleased to announce the availability of the following listed used Veeco VX310 Atomic Force Microscope.
Please click on the "Send More Details" button at the end of the VX310 description, if you'd like to get more details, photos and specifications of this Atomic Force Microscope, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Veeco VX310 Atomic Force Microscope is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Atomic Force Microscope|
|Version:||200 mm / 300 mm|
|Sales Condition:||as is where is|
|Sales Price:||140,000 EUR|
-Exact model: Veeco / Digital Instruments Dimension VX Series DUVx310
-AFM Vx310 (with Brooks robot for 300 or 200mm wafers)
-Made by Veeco, serviced in Aug 2015 by Bruker. Circa 2004, operational.
-Voltage setup: 120 VAC 7.3 A
-Open cassette 300 mm wafer loading.
-Open cassette and FOUP loading for 200 mm wafers
-Through the wall fab layout.
-See attached recent photos for current condition
-Can be inspected by appointment.
-Dimension Vx Atomic force Profiler
-Model Vx310 is for automated production
-Applications include Etch depth, line depth, CMP, imaging, profiling and HSG
-highest profiling resolution
-high scanning and 3D imaging speeds
-low contact forces and friction
-tapping mode eliminates destructive lateral forces
-Long scan (Up to 100 mm)
-Good step hight repeatability
-high lateral resolution
-Works well for depth metrology applications e.g High aspect ratio features >10:1
-< 5 nm lateral resolution
-2 A RMS noise
-Sub 0.18 um plug, line and via measurement
-AFM scans up to 65 um x 65 um
-Throughput: 7 wph with 5 sites for profiles and 5 wph for images
-Automated tip exchange and management
-Sub-micron feature locator
-Pattern recognition for post-CMP features
-HSMS SEMI E30 GRM
-100mm profile stage
-1μm X-Y axis repeatability
-6μm vertical range
-<5Å static step height
-repeatability on 0.1μm and 1μm steps, (1σ); 20 traces at
-20μm/sec scan speed
-262,000 data points/scan
-up to 100mm profile length
-up to 200μm/second scan speed
-512 x 512 data points
-Up to 65μm square area scans
-Die scale imaging
-3D visualization and analysis software
-Dual optics with 150μm and 600μm viewing area
-Low magnification optics (3mm viewing area)
Send Me More Details about this item.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
Established in 1998, SDI has now built up an international network of sales agents and offices.
SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.
Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.
Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America
SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.
Request monthly equipment news
We'd love to get your feedback about our website and our services!
Fill in the Feedback Form