Steag 421 Photoresist Coater and Developer for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Steag 421 Photoresist Coater and Developer.
Please click on the "Send More Details" button at the end of the 421 description, if you'd like to get more details, photos and specifications of this Photoresist Coater and Developer, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Steag 421 Photoresist Coater and Developer is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Steag 421 Equipment Details

SDI ID: 78340
Manufacturer: Steag
Model: 421
Description: Photoresist Coater and Developer
Version: Inquire
Vintage: 01.06.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 25,000 USD

We have one fully automated STEAG Microtech Coater/Developer Cluster 421 for sale.

The system is in very good condition and still working in production. Location Europe in a small fab.

Please refer to the attached photos for details.

This tool would be great for an R and D lab that needs photo-resist coating and developing capabilities.

System was shut down and removed April 2016.


System Overview:

-        Coater-Mosul with wafertec-pump, EBR

-        Developer-Modul

-        I/O-Station with seperate Input and Output

-        2x Hotplate and 1x Coolplate mounted on Stack

-        Robot for wafer transfer

-        Chiller to support Coolplate

-        2 folder with technical documentation and electrical drawings

-        1 box with various spare parts


Estimated rough weights and dimensions:

1. tool:                               width 1600mm x depth   900mm x hight 2000mm and weight 400 kg

                                            2. electrical cabinet:               width 1000mm x depth   600mm x hight 2000 mm and weight 250 kg

                                            3. chiller / ext.cab:               width 1000mm x depth 1000mm x hight 1000 mm and weight   50 kg

Attachments: 11 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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