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Lam Research 2300 METAL Etch METAL for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Lam Research 2300 METAL Etch METAL.
Please click on the "Send More Details" button at the end of the 2300 METAL description, if you'd like to get more details, photos and specifications of this Etch METAL, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Lam Research 2300 METAL Etch METAL is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Lam Research 2300 METAL Equipment Details

SDI ID: 78676
Manufacturer: Lam Research
Model: 2300 METAL
Description: Etch METAL
Version: 300 MM
Vintage: 01.06.2009
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 750,000 USD
Comments:
De-installed, crated, warehoused. Can be inspected by prior appointment.
Configuration:-

1. System Maker & Model

1) Maker LAM

2) Model LAM2300 Versys Kiyo 45 Metal

4) Wafer Size 12 inch

5) Type of Loadport SMIF(EFEM)

6) Number of Process Chamber 2 Metal Etch & 2 MWAVE STRPR



2. Configuration of SMIF

1) Signal Tower 3-colors

2) Number of Loadport 3


799-901175-004

4) Number of ATM Robot 1

5) Parts No. of ATM Robot 151864

6) Serial No. of ATM Robot 0908CHE10134

7) Buffer Station 25 slots, 1 Buffer Station

8) Aligner 1 Aligner



3. Configuration of Transfer Chamber

1) Number of Loadlock 2 LL / 4 Slot Cool Chamber

2) Model of Transfer Robot Megatran7 / Brooks

3) Serial No. of Transfer Robot

4) Parts No. of Rocker Valve 853-007859-9223 / 4ea

5) TM Pressure Gauge HPS Series907 / MKS

6) TM Pressure Control MKS Series640

7) LL Pressure Gauge HASTING



4. Configuration of Etch Chamber PM2 PM3

1) Model of Chamber 2300 Kiyo45 Metal 2300 Kiyo45 Metal

2) Year of Construction 2009 2010

3) Serial No. of Chamber 23K45-981(F123999-PM2) 23ML-5(F128728-PM2)

4) Model of Pressure Gauge MKS, 0.1Torr MKS, 0.1Torr

5) Model of Throttle Gate Valve 65048-PH52-ADR1 / VAT 65048-PH52-ADR1 / VAT

6) Model of Turbo Pump ATH2300M / Alcatel ATH2300M / Alcatel

7) Model of TCP RF Generator APEX2013 / AE APEX2013 / AE

8) Model of Bias RF Generator APEX1513 / AE APEX1513 / AE



5. Configuration of MW Chamber PM1 PM4

1) Model of Chamber 2300 MWAVE STRPR 2300 MWAVE STRPR

2) Year of Construction 2010 2009

3) Serial No. of Chamber 23ST45408 23ST45390

4) Model of Pressure Gauge


5) Model of Throttle Gate Valve 65048-PH52-ADR1 / VAT 65048-PH52-ADR1 / VAT

6) Model of Vaporizer


7) Model of MW Generator Revolution, 7690LAM-23 Revolution, 7690LAM-23

8) configuration of MFC Ar 2SLM Ar 2SLM


O2 5SLM O2 5SLM


N2 1SLM N2 1SLM




7. Configuration of Gas Panel, Etch Chamber PM2 PM3

1) Type of Gas Panel 16-Line IGS Gas Box Bolck Type

2) No of Gas Channel 16 Channel

2) Model of MFC SFC2480FAAPD2

3) Configuration of Gas SiCl4 60/200sccm SiCl4 60/200sccm


SiCl4 20sccm SiCl4 20sccm


SF6 60/200sccm SF6 60/200sccm


HBr 30/100sccm HBr 30/100sccm


CH2F2 6/20sccm CH2F2 6/20sccm


O2 20sccm O2 20sccm


NF3 150/500sccm NF3 150/500sccm


CF4 60/200sccm CF4 60/200sccm


CHF3 30/100sccm CHF3 30/100sccm


Ar 150/500sccm Ar 150/500sccm


N2 60/200sccm N2 60/200sccm


Cl2 15/50sccm Cl2 15/50sccm


O2 150/500sccm O2 150/500sccm


Cl2 150/500sccm Cl2 150/500sccm


CF4 15/50sccm CF4 15/50sccm


BCl3 50/200sccm BCl3 50/200sccm



9. Configuration of AC Rack


1) Power 208VAC 3ph 4Wires 400AMPS 50/60Hz



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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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