SDI fabsurplus.com is pleased to announce the availability of the following listed used PLASMA ETCH BT-1 PLASMA CLEANER.
Please click on the "Get Quote" button at the end of the BT-1 description, if you'd like to get a quotation, photos and specifications of this PLASMA CLEANER, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This PLASMA ETCH BT-1 PLASMA CLEANER is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

PLASMA ETCH BT-1 Equipment Details

SDI ID: 78807
Manufacturer: PLASMA ETCH
Model: BT-1
Vintage: 31.05.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Deinstalled, Warehoused. Can be inspected by appointment.
See attached photos to know the current condition of this item of equipment.

Standard Features

Electrode Configuration

Five Stacked Horizontal (20"Wx21"D + 3" Clearance) with Several Optional Configurations Available


600W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network

Gas Control

One 0-200cc Mass Flow Controller

Control System

Color PLC-Based Touch Screen Control Interface; Stores up to 20 Two-Step Recipes

Vacuum Gauge

1-2000 mT

Vacuum Pump

29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

3 Micron Oil Filtration System

Chamber Material

6061-T6 Aluminum

Chamber Dimensions


Unit Dimensions


Unit Weight

Approx. 1200lbs

Vacuum Pump Weight


Made in the U.S.A.

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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