|Description:||Rapid thermal anneal|
|Sales Condition:||as is where is|
2 Process Chambers,
3 FOUP with •Carrier ID reader (Hermos RF CID)
•MBC soak anneal controller
•Low temperature option including Low Temp MBC
•Fast cooling option (FAC and USJF)
•Low concentration processing kit
•Over pressure control
•N2 20 SLM
•N2 150 sccm
•O2 150 sccm
•O2 20 SLM
•O2 2 SLM
•Ar 150 sccm
•Ar 20 SLM
•O2 200 sccm
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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