fabsurplus.com is pleased to announce the availability of the following listed used Mattson Helios RPT Rapid thermal anneal. This Mattson Helios RPT Rapid thermal anneal is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Rapid thermal anneal and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Description:||Rapid thermal anneal|
|Sales Condition:||as is where is|
|Sales Price (each):||225,000 USD|
2 Process Chambers,
3 FOUP with •Carrier ID reader (Hermos RF CID)
•MBC soak anneal controller
•Low temperature option including Low Temp MBC
•Fast cooling option (FAC and USJF)
•Low concentration processing kit
•Over pressure control
•N2 20 SLM
•N2 150 sccm
•O2 150 sccm
•O2 20 SLM
•O2 2 SLM
•Ar 150 sccm
•Ar 20 SLM
•O2 200 sccm
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