TEL INDY Vertical Furnace SiGe-Poly for Sale

fabsurplus.com is pleased to announce the availability of the following listed used TEL INDY Vertical Furnace SiGe-Poly. This TEL INDY Vertical Furnace SiGe-Poly is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Vertical Furnace SiGe-Poly and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

TEL INDY Equipment Details

SDI ID: 79574
Manufacturer: TEL
Model: INDY
Description: Vertical Furnace SiGe-Poly
Version: 300mm
Vintage: 01.06.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 240,000 USD
 Wafer Type : 300mm-Si SEMI STD-Notch

 2-1-1. Dimension (Unit Name W × D x H)
   Furnace section  1100  X  3825   X  3631.5
   Gas Box  235  X  800    X  3086.5
   Power Box 1100  X  1100  X   2000

 2-1-2. Furnace mount

2-1-3. Heater & Genernal Specification

  Qty of  Production Wafers 100 
  Boat Operation (Handling Position) 1 Boat Type (B/E)
  ART Control None 
  N2 Load Lock Yes 
  Wafer Type 300mm-SI SEMI STD-Notch
  Heater Model Mid-Temp, VMM-56-002 5zone / 500-1000℃ 
  Process Condition LP 
  Maximum Operation Temperature (℃) 450℃
  Safety Specification SEMI S2-0703 / CE

 2-1-4. Cooling water piping
 2-1-5. Process Vacuum Line
 2-1-6. Base plate
 2-1-7. Fan Filter  unit (FFU)

 2-2. Automation
 2-2-1. Carrier I/O port
 2-2-2. Boat elevator
 2-2-3. Auto shutter
 2-2-4. Buffer stage : 16 ea
 2-2-5. Wafer counter : 2 ea

 2-3. Utility
 2-3-1. Power   
→ Power Consumption
Power (AC)                   Capacity                                  Remark
AC 110V, 3phase          62.3kVA (250A)                       Heater (VMM-56-002)

 → UPS
Power (AC)                  Capacity                                  Remark 
AC 110V, 1Phase          6.9kVA (50A)                           System Control, MMI etc.

 2-3-2. Gases  
→ Gas Supply
Gas Name      Pressure (MPa)    Gas Flow (ℓ/min)  Connection Methods      Unit
Pure N2 (GB)      0.5 ~ 0.7               65.5                     1/4" UJR                 Gas Box
SiH4                    0.2 ~ 0.3                3                         1/4" UJR                 Gas Box
10%GeH4/H2      0.2 ~ 0.3                3                         1/4" UJR                 Gas Box
1%BCl3/N2        -0.03 ~ -0.08          1.5                       1/4" UJR                 Gas Box O2                                                                                1/4" UJR                Gas Box
N2(GB2              0.5 ~ 0.7                                            1/4" Swagelok        Gas Box
Loader Vacuum  20kPa (-80kPaG)                               3/8" Swagelok       Gas Box

 → MFCs in Gas Box
Gas Name        Full Scale (ℓ/min)    Q'TY     Application                Maker
Pure N2 (GB)    50L                         1           Purge                       HORIBA STEC
SiH4                   2                            1           Process                    HORIBA STEC
10%GeH4/H2     2                            1           Process                    HORIBA STEC
1%BCl3/N2        0.5                          1           Process                    HORIBA STEC
O2                     0.1                          1           Process                    HORIBA STEC

 → MFMs in Gas Box
Gas Name     Full Scale (ℓ/min)       Q'TY      Application                Maker
SiH4                 2                              1            Process                   HORIBA STEC
10%GeH4/H2   2                              1            Process                   HORIBA STEC
1%BCl3/N2       0.5                           1            Process                   HORIBA STEC
O2                    0.1                           1            Process                   HORIBA STEC

→ Exhaust
Gas Name  Type of Exhaust    Flow Rate (㎥/min)  Connection Method  Used for
                     Scavenger Exhaust       4 (50~70Pa)    4" MF Flange  Heat Exhaust
Furnace Unit Heater Room Exhaust   4 (50~70Pa)    4" MF Flange  Heat Exhaust
Gas Box      Gas Cabinet Exhaust    3 (55~75Pa)   4" MF Flange General Exhaust
                 Exhaust Vent                  0.1                 1/2" UJR       Reactor Normal
                                                                                                Pressure Exhaust
Exhaust    Vacuum Exhaust                         ISO-MF NW-100 Process Gas Exhaust

→ Cooling Water
Gas Name   Pressure (Kgf/㎠)   Flow Rate (ℓ/min)   Connection Method   Used for
                    Mas. 0.5 Mpa (Gauge)  18.5              RC 3/4"   Heater, Manifold, Cap
Furnace Unit                                                          RC 3/4"                         Return

2-4. Controller system
2-4-1. Process controller : WAVES (POWER BOX)
2-4-2. Mechanism controller : Kawasaki controller (30C63E-A003)
2-4-3. Temp. controller  (Model-560A)
2-4-4. Over temp. detector 
2-4-5. Gas flow chart : front & back side
2-4-6. Pressure Controller (CKD Valve & CKD Controller)

2-5.Specification For Major Parts
2-5-1. Gas System
-. Major Designated Parts and Devics
Part                              Manufacturer                                           Model             
Filter                             PALL                                                        Metal Type
Air Valve                      Fujikin                                           FPR & FBSDAL Series
MFC                            HORIBA STEC                                         SEC-Z512MGX
Hand Valve                  Fujikin                                            FUNDL-21G-6.35UGF
Regulator                    Parker                                                       SQ Series
Pressure Transmitter    TEM TECH                     YPFU-WD-420 (-0. 0-1. 5MPA) 3

 2-5-2. Gas Exhaust System
-. Major Components
Part                       Manufacturer                    Model                           Remarks

Exhaust Controller CKD                                 VEC-VH8G-X0105        Progress Flow Meter            CKD                             KHT-X0071-FL326768      Progress

2-5-3. Manifold
- Water Cooling Flange to be applied

2-6. Temperature measurement
3-6-1. Spike T/C
3-6-2. Inner T/C ( 5 zone, Set-up in inside)
3-6-3. Over temp. detector T/C ( single one point)

2-7. Optional Parts
2-7-1.  Signal tower (3 colors)
2-7-2.  Step down transformer ( 220V → 110V transition )
2-7-3.  N2 Charge System (Upper Cover ~ Buffer Stage)
2-7-4.  N2 Charge System  Monitor (Gas Box Side)

3. Gas Flow Chart






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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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