SPTS 320 PC Reactive Ion Etcher for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used SPTS 320 PC Reactive Ion Etcher.
Please click on the "Get Quote" button at the end of the 320 PC description, if you'd like to get a quotation, photos and specifications of this Reactive Ion Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SPTS 320 PC Reactive Ion Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

SPTS 320 PC Equipment Details

SDI ID: 79584
Manufacturer: SPTS
Model: 320 PC
Description: Reactive Ion Etcher
Version: 200 mm
Vintage: 31.05.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

-Deinstalled, warehoused.
-In working condition
-See photos for details
-Available for immediate consignment
-Can be inspected by appointment
-Located in Avezzano 67051 Italy.

-Can be inspected by appointment
-Manual loading
-includes PC control system
-includes manuals
-includes Leybold mechanical pump
-includes Leybold turbo pump
-Leybold turbo pump controller type: Turbotronix NT 151 / 361

-Cathode diameter: 30 cm
-Cathode area: 706.5 cm2
-RF forward power range: 10 to 600 watts
-Chamber max pressure: 500 mtorr
-Substrate sizes: 2 to 8 inch and small fragments
-Number of gas lines available: 8

Reactive Ion Etching is a technique which is used to selectively etch thin films in micro-electronic devices. It used both physical and chemical etching. An appropriate gas mixture needs to be selected to obtain the best process results.
Etch rates can be adjusted by changing the electrode bias, RF power, chamber pressure and the gas flow rates. RIE can provide highly anisotropic surfaces.
With the STS 320PC, recipes can be changed easily to allow the processing of new materials.

Shipping information:
Dimensions: 800 mm x 800 mm x 1200 mm (h) weight 400 KG

Attachments: 3 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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