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Hitachi M712E ECR Plasma Etcher for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Hitachi M712E ECR Plasma Etcher.
Please click on the "Get Quote" button at the end of the M712E description, if you'd like to get a quotation, photos and specifications of this ECR Plasma Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Hitachi M712E ECR Plasma Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Hitachi M712E Equipment Details

SDI ID: 81831
Manufacturer: Hitachi
Model: M712E
Description: ECR Plasma Etcher
Version: 200mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

 

Hitachi M-712E* ECR Plasma Etcher

• Manufacturer: Hitachi America LTD

• Model: M-712E ECR

• Wafer Size: 200mm

• Wafer Loading Module (Mini-Environment)

o Three (3) Cassette Load Ports

o Four-Axis Robot

o Wafer Centering Unit: notch alignment and centering

o Fan Filter Unit

• Buffer / Loadlock Chamber

o Two-Axis Robot

o Buffer Turbo Molecular Pump (subject to availability)

• Man/Machine Interface

o Personal Computer with Magnetic/Optical Drive

o LCD Display

o Keyboard/Pointer

• Two (2) ECR Etch Chambers

• Two (2) Gas Boxes- One per chamber: Ar, Cl2, SF6, HBr, CF4, CHF3, O2, spare

o Capacitance Manometers (2)

o Penning Gauge

o Microwave Power Monitor / Auto Tuner

o Chamber Temperature Control Module

o Etch Turbo Molecular Pump (subject to availability)

o Etch Coil Magnet: 3-coil type

o Coil Cooling Water Flow Sensors

o Dual Input Endpoint Detection System

o Backside Helium Cooling

• Two (2) Power Supply Units- One per chamber

• Two (2) EC Temperature Controllers- One per chamber

• Facility Interface Box

• Transformer Box

• FFB unit

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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