TEL Tokyo Electron UNITY M 85TD Oxide Etcher for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron UNITY M 85TD Oxide Etcher. This TEL Tokyo Electron UNITY M 85TD Oxide Etcher is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this Oxide Etcher and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

TEL Tokyo Electron UNITY M 85TD Equipment Details

SDI ID: 83690
Manufacturer: TEL Tokyo Electron
Model: UNITY M 85TD
Description: Oxide Etcher
Version: 200 mm
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 988,000 USD
Process: Oxide Etch Current Location: In Storage

Configuration / Checklist:-

Main Etcher Components Quantity Comment or Condition
Load Lock Module (LLM) 1 Both cassette doors are open
Transfer Chamber (TC) 1 Good
Pre Aligner (PA) 1 Good
Process Chambers (PC) (Separately) 2 In atmosphere, good condition
TMP (TC) (Still hooked to TC) 1 Good
Gate Valves (TC) (Still on TC) 3 Good
Display (Still on main unit) 1 Good
Light Tower 1 Good
Bottom RF Matchers (Still on PCs ) 2 Good
Upper Electrode Cooling Fans 2 One is still on tool but one is in a crate
ESCs 2 In Chamber
Baffle Plates 2 In Chamber
Shield Ring 2 In Chamber
Upper Electrode 2 In Chamber
Focus Ring 1 In a box
Quartz Insulators 2 In a box
Ceramic Insulator 1 In a box
Quartz Pipe 1 In a box
Pedestals 2 Good
Pumps Quantity Comment or Condition
Process Chamber Dry Pumps (EBARA) 2 Good
Load Lock Dry Pump (EBARA) 1 Good
Transfer Chamber Dry Pump (EBARA) 1 Good
Dry Pumps Rack 2 No picture for the second rack
Process Chamber TMP 0 Two PC TMP pumps are missing

Gas Boxes Quantity Comment or Condition
Gas Boxes 2 Good

Main Controllers Quantity Comment or Condition
Hard Drive Disks 4 Still on control rack
Control Boards, AI/AO Boards set 2 Still on tool
Big System Control Box 1 Good
TC Controller Box 1 Good
AC Power Box Quantity Comment or Condition
AC Distribution Box 1
Chillers Quantity Comment or Condition
SMC Dual Chiller 1 Good
SMC Single Chiller 1 Good
Chiller Hoses 4 Good
Cables Quantity Comment or Condition
Pump Power Cables 5 Good
Pump Control Cables 4 Good
Power Cables 6 On dry pumps rack
Chiller Control Cables 3 Good
Interface Cable 1 Good
Gas Box Cable 1 Good
AC Cable 1 Good
Remote Pump Cables 5 Good

Foreline Quantity Comment or Condition
V-37 Valves 2 Good
Several foreline connecting pips in a plastic bag Good

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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