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AKT 1600 PECVD Gen 2 PECVD deposition system for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used AKT 1600 PECVD Gen 2 PECVD deposition system. This AKT 1600 PECVD Gen 2 PECVD deposition system is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this PECVD Gen 2 PECVD deposition system and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


AKT 1600 Equipment Details

SDI ID: 83935
Manufacturer: AKT
Model: 1600
Description: PECVD Gen 2 PECVD deposition system
Version: Gen 2
Vintage: 01.06.2005
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price (each): 625,000 USD
Comments:

Please find attached the pictures of the AKT 1600 machine we have available.
As you can see its a 100% complete machine including chillers interconnect cables and so on.

This machine is also equipped with remote plasma units that will significant reduce the amount of chamber PM’s and chemicals needed to operate.
Machine has been installed and running production (R&D)  for 7 years in day shift operation, saying this parts like RF generators / matches are in good condition.

Configuration:-

Configuration:-
AKT 1600 PECVD
Software rev: AKT7.3

1. Mainframe
5 x CVD process chambers
2 x loadlocks
1 x AKT vacuum robot

ChA chamber controller
0240-67523
Rev 06
s/n 675230014
Date 9/6/05

ChB chamber controller
0240-67523
Rev 06
s/n 675230015
Date 9/6/05

ChC chamber controller
0240-67523
Rev 06
s/n 675230016
Date 9/6/05

ChD chamber controller
0240-67523
Rev 06
s/n 675230017
Date 9/6/05

ChE chamber controller
0240-67523
Rev 09
s/n 675230038
Date 2/5/08

2. Front end load station
4 x cassette load stations
1 x AKT track robot

3. System controller
VME, DIO, PSU & circuit breakers

4. Gasboxes
2 x gasboxes with MFCs & manual valves
Configuration:-
NF3   
Ar   
N2O   
NH3   
N2   
SiH4   
B2H6_H2    H2   
Ph3_H2

5. Heat exchanger
REX F900

6. Main AC box
208VAC input
Full load 240A
4 x RF generators

ChA Generator
AdTec AX2000 EUII
s/n 10124200585

ChB Generator
AdTec AX2000 EUII
s/n 10124200584

ChC Generator
AdTec AX2000 EUII
s/n 10124200582

ChD Generator
AdTec AX2000 EUII
s/n 10124200583

ChE Generator
AdTec AX2000 EUII
s/n 10124200656

7. Sun workstation controller    Sunblade 150 computer


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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