fabsurplus.com is pleased to announce the availability of the following listed used Novellus Concept 2 Dual Altus (Shrink) CVD system for Tungsten Deposition. This Novellus Concept 2 Dual Altus (Shrink) CVD system for Tungsten Deposition is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this CVD system for Tungsten Deposition and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Model:||Concept 2 Dual Altus (Shrink)|
|Description:||CVD system for Tungsten Deposition|
|Sales Price (each):||1,120,000 USD|
Refurbished Novellus Concept Two Dual Altus Shrink System including:-
1-1 DLCM and System
1) Refurbished Right / Left Load Lock Indexer
2) Replace Gas Filters in Plumbing Assy, Gases, DLCM
3) Replace Diffuser, Sintered, Loadlock
4) Recalibration All Pressure Gauge (MKS Heated)
5) System and DLCM Module Controller (MC3)
6) Replace Loadlock Door O-Ring
7) Refurbished Transfer Mag7 Robot Ass’y with dual arm set
8) Refurbished Standard Cassette Shuttle
9) Refurbished Slit Valve Ass’y (PM & L/L)
10) Refurbished Throttle Valve Ass’y
11) Refurbished Chase Computer
12) Refurbished 3 Slot Cool Station
13) Refurbished SSD
14) SECS/GEM and HSMS
15) Repainted All Skin Covers
1-2 2 Process Chamber
1) Replaced 2 nd New MOER Ring (Customer configuration)
2) Replaced 2 nd New Pedestal Ass'y
3) Refurbished Shower Head Ass'y
4) Replaced All MFCs ( Brand New Brooks GF 100 or 125 Series )
5) Module Controller (MC3)
6) Refurbished Spindle Ass'y
7) Refurbished Pin Lift Ass’y Pedestal
8) Refurbished HF Purge Assy
9) Refurbished Throttle & Gate Valve Ass’y
10) 2 nd New Tong, Ring Lift
11) Replaced Low Spindle Ass’y
12) Refurbished RF Generator (AE RFG3000)
13) Refurbished AE Matching Network
14) Recalibration all pressure gauge (MKS Heated)
15) Replaced Process Chamber O-Rings
16) Replaced Gas Box All Filters
17) Manual shut-off valve for hazardous gases
18) Separated exhaust for SiH4
19) Optical EndPoint Detector
20) Re-Polishing Process Chamber
21) Clean Work for Gas Plumbing.
22) Refurbished "0" Station stage
23) Refurbished All Valve and Cleaning Gas Line
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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