SDI fabsurplus.com is pleased to announce the availability of the following listed used Changzhou Jiangnan Power Photovoltaic Equipment Co., Ltd TDR 95 Ingot Grower for Monocrystalline Silicon.
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This Changzhou Jiangnan Power Photovoltaic Equipment Co., Ltd TDR 95 Ingot Grower for Monocrystalline Silicon is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
SDI ID: | 84789 |
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Manufacturer: | Changzhou Jiangnan Power Photovoltaic Equipment Co., Ltd |
Model: | TDR 95 |
Description: | Ingot Grower for Monocrystalline Silicon |
Version: | 8 inch and 9 inch |
Vintage: | 31.03.2010 |
Quantity: | 5 |
Sales Condition: | as is where is |
Lead Time: | immediately |
Sales Price (each): | Inquire |
Comments: | Monocrystalline silicon manufacturing equipment Model TDR95 April 26, 2010 Changzhou Jiangnan Power Equipment Group Co., Ltd 1 Chapter 1 Device Overview 1-1 【Purpose】 This equipment is used for the production of solar cell grade monocrystalline silicon CZ-type crystal pulling device. 1-2 【Summary】 The polycrystalline silicon raw material is filled in the quartz crucible, evacuated in the furnace body and heated to high temperature melting. From the rotation of the subject To the temperature control of the melt above the single crystal small pieces (hereinafter referred to as seed) and rotating crucible in the molten silicon contact, in the Under the precise control of the temperature, the monocrystalline silicon is made by pulling the seed up while rotating it. This equipment is made up of the following Element composition. 1-3 [Structure of single crystal silicon manufacturing device TDR95 type] 1) main body Z seed lifting device Z on the furnace Z baffle valve Z main furnace Z crucible drive mechanism and platform Z furnace lifting mechanism Z furnace lifting mechanism Z diameter monitoring control system Z temperature measurement system Z console Z power supply system Z Vacuum and Ar gas Z for cooling water 1-4 【Manual and automatic definition】 Z hand Z semi-automatic: through the control panel, the device for remote control. Z from To move the equipment by labor. Action: the system to determine the conditions, so that equipment operation. Chapter 2 The main parameters 2-1 【Product Specifications】 1) Crystalline diameter: 9 ", 8" 2) Crystalline length: 2,000 mm or less (Neck-Crown-Body-Tail) 3) Crystalline weight: 120 kg or less 2-2 【Design specifications】 1) Ambient temperature: 15 ~ 25 ° C 2) Ambient humidity: 40 to 70% (need to ensure that no condensation occurs) 3) cleanliness: the general environment 24) Thermal field (below H / Z) Specifications: 22 ", or 20" 5) Crucible specifications: φ22 "× H15.5", or φ20 "× H15" 6) Material filling amount: 120kg or less 7) Ar flow control mode: automatic 8) Vacuum control mode: manual 9) furnace opening mode Lift: semi-automatic Rotation: half manual 10) Vacuum degree Crystallization of the drawing environment: 2.7kPa (20Torr) Cold furnace ultimate vacuum: 3Pa below 11) Allowable leakage: 0.6 mTorr / min or less 12) Crucible shaft bearing capacity: 250kg 2-3 1) Support system specifications power supply Z AC input: three-phase AC440V Z voltage range: 396V ~ 484V Z Input capacity: 240KVA 2) z 50 / 60Hz Cooling water (industrial pure water) Water quality: PH = 6.0 ~ 8.0 Hardness (CaCO 3) <150 PPM Conductivity <500μS / CM Chloride ion (Cl -) <100PPM 2- Sulfate ion (SO 4) & lt; 200 PPM Carbonate base (CaCO 3) 15 ~ 60PPM Z flow: 320L / min ~ 340L / min (including power cooling water) Z Water pressure: 3kg / c m2 ~ 3.5kg / c m2 Z out of water pressure difference: 2kg / c m2 above Z Water temperature: 15 ~ 25 ° C 3) Ar gas flow Z Flow: <150L / min Z Pressure: 0.2 MPa (2.1 kg / c m2) or more 4) main vacuum pump capacity Z to reach the degree of vacuum: Z exhaust capacity: 4200L / min or more 6.7 × 10 -2 Pa Caliber: equivalent to NW80 (suction, exhaust) 5) z Auxiliary vacuum pump capability -2 To reach the degree of vacuum: 6.7 × 10 Pa 3z exhaust capacity: 480L / min or more Z diameter: NW25 (suction, exhaust) 6) Installation site, method: According to the equipment foundation, F / L and ceiling height and other specific circumstances to decide separately. 7) Weight Z furnace body: about 1800kg Z machine Z operation box: about 200kg Z Power box: about 2100kg 8) Frame: about 2500kg z Height of equipment 7400mm or less (the height from the lowest part of the main body to the top of the seed lift) ※ In the case of rising furnace Chapter 3 The main parameters of each component 3-1 【Unit】 1) z Seed lifting device (hanging wire type) Component Summary A seed roller, a wire roll for winding a seed cord, a shaft for driving the whole movement thereof, and a motor. Through the slip ring to the rotating part of the power supply. z Component specifications Seed crystal axis travel: about 3,400mm Lifting speed: low ... 0.2 ~ 10.5mm / min : High ... 500mm / min Rotation speed (CW): 2 ~ 40rpm Can be drawn crystal weight: 120kg or less Observation window: one place Hanging line: Material: tungsten 19 × 7 (strands) Diameter: about 2.5mm Seed chuck: Main body: molybdenum シ ー ド ホ ル Chuck part: SUS316L 2) on the furnace tube z Component Summary Used to store drawn crystals From the top of the furnace and the upper furnace z Component specifications Maximum storage capacity: 2,000mm (Neck-Crown-Body-Tail) Inside Diameter: 320mm Observation window: one place 43) Baffle valve: z Component Summary As an isolation valve between the furnace body and the lid z Component specifications Structure Made: flap type (water-cooled) Inner diameter: 320mm Observation window: one place Position SW: two (on, off) 4) main furnace body z Component Summary By the furnace lid, furnace tube, furnace chassis composition z Component specifications high Degree: lid height: 370mm Furnace height: 850 mm Lower furnace height: 400 mm Inside Diameter: 950mm Temperature level: 720 mm Observation window: diameter monitor camera: one ビ ュ ー ポ visual use: one place ビ ュ ー ー prepared With: one place Furnace chassis: flat, with a double structure, the middle of the water cooling. There are four electrodes passing through the floor (two groups). Electrode center distance: one group is: 430 mm, the other group is: 480 mm 5) Crucible drive mechanism z Component Summary By the crucible rotary shaft, base, motor and other components z Component specifications Rotation speed (CCW): 0.5 to 20 rpm Lifting axis travel: Lifting speed: 400mm Low speed: 0.04 to 0.63 mm / min High speed: 150mm / min Manual lifting function: Yes Bellows: SUS316L (welded bellows) magnetic Seal: magnetic fluid Lifting rotary drive shaft: water-cooled double-layer structure Adjust the body Level: Yes Limit SW: two (upper and lower limits) 6) z Furnace lifting mechanism Component Summary 5 Raise and rotate the upper or lower parts of the furnace cover. z Component specifications Lift drive mode: semi-automatic Lifting axis travel:> 350mm Rotary drive mode: semi-automatic Rotation range: within 120 ° (to the left when facing the front of the device) 7) Furnace lifting mechanism z Component Summary So that the furnace for lifting and rotating action. z Component specifications Lift drive mode: semi-automatic Lifting trip:> 650mm Rotary drive mode: semi-automatic Rotation range: 120 ° (rotation to the right side facing the front of the device) 8) Crystal diameter measurement system: Component Summary: And is composed of a diameter measuring monitor member and a visual measuring member z Component specifications Measurement accuracy (surveillance camera) ... 0.1mm 9) z Temperature measurement system Component Summary The temperature outside the heater is measured by a radiation thermometer and the heater is controlled. z Component specifications Repeatability: 0.1% (entire range) Measuring range: 600 ~ 1800 ° C The measurement wavelength was 0.85 to 1.1 μm 10) z Control panel and distribution cabinet Component Summary As a man-machine interface and control of the equipment. 11) z power supply Component Summary Heater power supply and other power supply components z Component specifications Rated power output: 55V 3000A 165KW Output adjustment range: 16.5KW ~ 165KW (300A ~ 3000A, 5.5V ~ 55V) Output control mode: power control Power control accuracy: rated DC output within ± 2% 12) Vacuum and Ar gas flow divider: 6z Component Summary The vacuum and the gas are distributed from the existing facilities of the purchaser to the parts z Component specifications The diameter of the vacuum pipe: φ80 mm Control valve: true Empty: manual Ar Gas: semi-automatic Interface location: Vacuum: Lower furnace chassis (main vacuum pump) ポ ー ト position baffle valve (auxiliary vacuum pump) ポ ー Ar gas: the upper part of the upper tube ポ ー ト bit 13) The upper part of the lid Cooling water shunt z Component Summary Means for dispensing water from the main assembly of the cooling water to each component. 3-2 【 control method 】 1) Controller composition Touch PC, PLC control system. 2) Process control method 1 vacuum manual 2 leak detection manual / automatic 3 material manual / automatic 4 stable manual / automatic 5 necking manual / automatic (manual intervention) 6 put the shoulder manually / automatically 7 Shoulder Hand / Auto 8 equal diameter drawing Manual / Auto 9 end manually / automatic 10 Cooling Manual / Auto To In the melt stabilization phase, with power / temperature control switching function. Data backup / COPY to other company equipment use 3-3 Take out the crystal After the furnace is raised by the furnace opening / lifting mechanism, the crystal is taken out by 120 °. Chapter 4 Others This specification is forbidden to be copied or disclosed to third parties without the approval of the Company. This specification is for reference only, the specific parameters may be updated. Changzhou Jiangnan Power Equipment Group Co., Ltd |
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