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Changzhou Jiangnan Power Photovoltaic Equipment Co., Ltd TDR 95 Ingot Grower for Monocrystalline Silicon for Sale


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Changzhou Jiangnan Power Photovoltaic Equipment Co., Ltd TDR 95 Equipment Details

SDI ID: 84789
Manufacturer: Changzhou Jiangnan Power Photovoltaic Equipment Co., Ltd
Model: TDR 95
Description: Ingot Grower for Monocrystalline Silicon
Version: 8 inch and 9 inch
Vintage: 01.04.2010
Quantity: 5
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 140,000 USD
Comments:
Monocrystalline silicon manufacturing equipment
Model TDR95
April 26, 2010
Changzhou Jiangnan Power Equipment Group Co., Ltd
1 Chapter 1 Device Overview
1-1 【Purpose】
This equipment is used for the production of solar cell grade monocrystalline silicon CZ-type crystal pulling device.
1-2 【Summary】
The polycrystalline silicon raw material is filled in the quartz crucible, evacuated in the furnace body and heated to high temperature melting. From the rotation of the subject
To the temperature control of the melt above the single crystal small pieces (hereinafter referred to as seed) and rotating crucible in the molten silicon contact, in the
Under the precise control of the temperature, the monocrystalline silicon is made by pulling the seed up while rotating it. This equipment is made up of the following
Element composition.
1-3 [Structure of single crystal silicon manufacturing device TDR95 type]
1)
main body
Z seed lifting device
Z on the furnace
Z baffle valve
Z main furnace
Z crucible drive mechanism and platform
Z furnace lifting mechanism
Z furnace lifting mechanism
Z diameter monitoring control system
Z temperature measurement system
Z console
Z power supply system
Z Vacuum and Ar gas
Z for cooling water
1-4
【Manual and automatic definition】
Z hand
Z semi-automatic: through the control panel, the device for remote control.
Z from
To move the equipment by labor.
Action: the system to determine the conditions, so that equipment operation.
Chapter 2 The main parameters
2-1
【Product Specifications】
1) Crystalline diameter: 9 ", 8"
2) Crystalline length: 2,000 mm or less (Neck-Crown-Body-Tail)
3) Crystalline weight: 120 kg or less
2-2
【Design specifications】
1) Ambient temperature: 15 ~ 25 ° C
2) Ambient humidity: 40 to 70% (need to ensure that no condensation occurs)
3) cleanliness: the general environment
24) Thermal field (below H / Z) Specifications: 22 ", or 20"
5) Crucible specifications: φ22 "× H15.5", or φ20 "× H15"
6) Material filling amount: 120kg or less
7) Ar flow control mode: automatic
8) Vacuum control mode: manual
9) furnace opening mode
Lift: semi-automatic
Rotation: half manual
10)
Vacuum degree
Crystallization of the drawing environment: 2.7kPa (20Torr)
Cold furnace ultimate vacuum: 3Pa below
11) Allowable leakage: 0.6 mTorr / min or less
12) Crucible shaft bearing capacity: 250kg
2-3
1)
Support system specifications
power supply
Z AC input: three-phase AC440V
Z voltage range: 396V ~ 484V
Z Input capacity: 240KVA
2)
z
50 / 60Hz
Cooling water (industrial pure water)
Water quality:
PH = 6.0 ~ 8.0
Hardness (CaCO 3) <150 PPM
Conductivity <500μS / CM
Chloride ion (Cl -) <100PPM
2-
Sulfate ion (SO 4) & lt; 200 PPM
Carbonate base (CaCO 3) 15 ~ 60PPM
Z flow: 320L / min ~ 340L / min (including power cooling water)
Z Water pressure: 3kg / c m2 ~ 3.5kg / c m2
Z out of water pressure difference: 2kg / c m2 above
Z Water temperature: 15 ~ 25 ° C
3)
Ar gas flow
Z Flow: <150L / min
Z Pressure: 0.2 MPa (2.1 kg / c m2) or more
4) main vacuum pump capacity
Z to reach the degree of vacuum:
Z exhaust capacity: 4200L / min or more
6.7 × 10 -2 Pa
Caliber: equivalent to NW80 (suction, exhaust)
5)
z
Auxiliary vacuum pump capability
-2
To reach the degree of vacuum: 6.7 × 10 Pa
3z exhaust capacity: 480L / min or more
Z diameter: NW25 (suction, exhaust)
6) Installation site, method: According to the equipment foundation, F / L and ceiling height and other specific circumstances to decide separately.
7) Weight
Z furnace body: about 1800kg
Z machine
Z operation box: about 200kg
Z Power box: about 2100kg
8)
Frame: about 2500kg
z
Height of equipment
7400mm or less (the height from the lowest part of the main body to the top of the seed lift)
※ In the case of rising furnace
Chapter 3 The main parameters of each component
3-1
【Unit】
1)
z
Seed lifting device (hanging wire type)
Component Summary
A seed roller, a wire roll for winding a seed cord, a shaft for driving the whole movement thereof, and a motor.
Through the slip ring to the rotating part of the power supply.
z
Component specifications
Seed crystal axis travel: about 3,400mm
Lifting speed: low ... 0.2 ~ 10.5mm / min
: High ... 500mm / min
Rotation speed (CW): 2 ~ 40rpm
Can be drawn crystal weight: 120kg or less
Observation window: one place
Hanging line:
Material: tungsten
19 × 7 (strands)
Diameter: about 2.5mm
Seed chuck:
Main body: molybdenum
シ ー ド ホ ル Chuck part: SUS316L
2) on the furnace tube
z
Component Summary
Used to store drawn crystals
From the top of the furnace and the upper furnace
z
Component specifications
Maximum storage capacity: 2,000mm (Neck-Crown-Body-Tail)
Inside
Diameter: 320mm
Observation window: one place
43) Baffle valve:
z
Component Summary
As an isolation valve between the furnace body and the lid
z
Component specifications
Structure
Made: flap type (water-cooled)
Inner diameter: 320mm
Observation window: one place
Position SW: two (on, off)
4) main furnace body
z
Component Summary
By the furnace lid, furnace tube, furnace chassis composition
z
Component specifications
high
Degree: lid height: 370mm
Furnace height: 850 mm
Lower furnace height: 400 mm
Inside
Diameter: 950mm
Temperature level: 720 mm
Observation window: diameter monitor camera: one
ビ ュ ー ポ visual use: one place
ビ ュ ー ー prepared
With: one place
Furnace chassis: flat, with a double structure, the middle of the water cooling. There are four electrodes passing through the floor (two groups).
Electrode center distance: one group is: 430 mm, the other group is: 480 mm
5) Crucible drive mechanism
z
Component Summary
By the crucible rotary shaft, base, motor and other components
z
Component specifications
Rotation speed (CCW): 0.5 to 20 rpm
Lifting axis travel:
Lifting speed:
400mm
Low speed: 0.04 to 0.63 mm / min
High speed: 150mm / min
Manual lifting function: Yes
Bellows: SUS316L (welded bellows)
magnetic
Seal: magnetic fluid
Lifting rotary drive shaft: water-cooled double-layer structure
Adjust the body
Level: Yes
Limit SW: two (upper and lower limits)
6)
z
Furnace lifting mechanism
Component Summary
5 Raise and rotate the upper or lower parts of the furnace cover.
z
Component specifications
Lift drive mode: semi-automatic
Lifting axis travel:> 350mm
Rotary drive mode: semi-automatic
Rotation range: within 120 ° (to the left when facing the front of the device)
7) Furnace lifting mechanism
z
Component Summary
So that the furnace for lifting and rotating action.
z
Component specifications
Lift drive mode: semi-automatic
Lifting trip:> 650mm
Rotary drive mode: semi-automatic
Rotation range: 120 ° (rotation to the right side facing the front of the device)
8)
Crystal diameter measurement system:
Component Summary:
And is composed of a diameter measuring monitor member and a visual measuring member
z
Component specifications
Measurement accuracy (surveillance camera) ... 0.1mm
9)
z
Temperature measurement system
Component Summary
The temperature outside the heater is measured by a radiation thermometer and the heater is controlled.
z
Component specifications
Repeatability: 0.1% (entire range)
Measuring range: 600 ~ 1800 ° C
The measurement wavelength was 0.85 to 1.1 μm
10)
z
Control panel and distribution cabinet
Component Summary
As a man-machine interface and control of the equipment.
11)
z
power supply
Component Summary
Heater power supply and other power supply components
z
Component specifications
Rated power output: 55V
3000A
165KW
Output adjustment range: 16.5KW ~ 165KW (300A ~ 3000A, 5.5V ~ 55V)
Output control mode: power control
Power control accuracy: rated DC output within ± 2%
12)
Vacuum and Ar gas flow divider:
6z
Component Summary
The vacuum and the gas are distributed from the existing facilities of the purchaser to the parts
z
Component specifications
The diameter of the vacuum pipe: φ80 mm
Control valve: true
Empty: manual
Ar
Gas: semi-automatic
Interface location:
Vacuum: Lower furnace chassis (main vacuum pump)
ポ ー ト position baffle valve (auxiliary vacuum pump)
ポ ー Ar gas: the upper part of the upper tube
ポ ー ト bit
13)
The upper part of the lid
Cooling water shunt
z
Component Summary
Means for dispensing water from the main assembly of the cooling water to each component.
3-2
【 control method 】
1)
Controller composition
Touch PC, PLC control system.
2)
Process control method
1 vacuum manual
2 leak detection manual / automatic
3 material manual / automatic
4 stable manual / automatic
5 necking manual / automatic (manual intervention)
6 put the shoulder manually / automatically
7 Shoulder Hand / Auto
8 equal diameter drawing
Manual / Auto
9 end manually / automatic
10 Cooling Manual / Auto
To
In the melt stabilization phase, with power / temperature control switching function.
Data backup / COPY to other company equipment use
3-3
Take out the crystal
After the furnace is raised by the furnace opening / lifting mechanism, the crystal is taken out by 120 °.
Chapter 4 Others
This specification is forbidden to be copied or disclosed to third parties without the approval of the Company.
This specification is for reference only, the specific parameters may be updated.
Changzhou Jiangnan Power Equipment Group Co., Ltd
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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
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