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ALD TIN process. Basic Tool Configuration - Mainbody and Axes Included - Wafer Transfer Robot Included - OHT(I/O) Stage Included - Clean Unit Module Included - Operation Controller (CX5000) Included - Gas Pattern Panel Included - Integrated Gas Unit : Fujikin/CKD 1.125 inch Stic k Type Included - MFC : STEC/CKD Included - Exhaust Box Included - Valve Box (BCD/CVD) Included - Power Box (480V-3Phase, 120V or 208V-Single Phase ) Included - Semi Standard (S2,S8) Included Accessories - Rapid Heating/Cooling Mech. For Heater - - Boat Rotation Included - Initial Quartzware Set (BCD-Quartz, Diffusion-SiC Boat/Liner) Not included in basic - N2 Purge System(BCD/CVD) Included - Bubbling(& Bottle Heater) Unit for TiN Included - Heating Unit(around furnace port)(BCD/CVD) Included - External Torch Unit(Oxide) - - MP Transfer Robot(Wafer Detection System(cross)) Included - Gas Unit System for Ta precursor - - Gas Unit System for Al precursor and TMA Box - - Gas Line for Cl2 cleaning capability - - TiN PC Kit(Filters, Valve Heater) - - Clamp Heater - - Ampoules for TiCl4 and TMA (HiKE) - Seismic Restraint Included - S3 Configuration Items specified by customer Included
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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