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Kokusai DD-1223VN Vertical Furnace for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Kokusai DD-1223VN Vertical Furnace. This Kokusai DD-1223VN Vertical Furnace is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Vertical Furnace and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Kokusai DD-1223VN Equipment Details

SDI ID: 84884
Manufacturer: Kokusai
Model: DD-1223VN
Description: Vertical Furnace
Version: 300 MM
Vintage:
Quantity: 1
Sales Condition: as is where is
Lead Time:
Sales Price (each): Inquire
Comments:
ALD TIN process. Basic Tool Configuration - Mainbody and Axes Included - Wafer Transfer Robot Included - OHT(I/O) Stage Included - Clean Unit Module Included - Operation Controller (CX5000) Included - Gas Pattern Panel Included - Integrated Gas Unit : Fujikin/CKD 1.125 inch Stic k Type Included - MFC : STEC/CKD Included - Exhaust Box Included - Valve Box (BCD/CVD) Included - Power Box (480V-3Phase, 120V or 208V-Single Phase ) Included - Semi Standard (S2,S8) Included Accessories - Rapid Heating/Cooling Mech. For Heater - - Boat Rotation Included - Initial Quartzware Set (BCD-Quartz, Diffusion-SiC Boat/Liner) Not included in basic - N2 Purge System(BCD/CVD) Included - Bubbling(& Bottle Heater) Unit for TiN Included - Heating Unit(around furnace port)(BCD/CVD) Included - External Torch Unit(Oxide) - - MP Transfer Robot(Wafer Detection System(cross)) Included - Gas Unit System for Ta precursor - - Gas Unit System for Al precursor and TMA Box - - Gas Line for Cl2 cleaning capability - - TiN PC Kit(Filters, Valve Heater) - - Clamp Heater - - Ampoules for TiCl4 and TMA (HiKE) - Seismic Restraint Included - S3 Configuration Items specified by customer Included
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