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Hitachi RS4000 In-line Defect Review SEM for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Hitachi RS4000 In-line Defect Review SEM.
Please click on the "Send More Details" button at the end of the RS4000 description, if you'd like to get more details, photos and specifications of this In-line Defect Review SEM, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Hitachi RS4000 In-line Defect Review SEM is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Hitachi RS4000 Equipment Details

SDI ID: 86275
Manufacturer: Hitachi
Model: RS4000
Description: In-line Defect Review SEM
Version: 200 mm / 300 mm
Vintage: 01.01.2007
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:

In-line Defect Review SEM for Next-generation Device Production:
RS-4000
Hitachi  has  developed  the  Model  RS-4000  In-
line  Defect  Review  SEMs  to  meet  the  production  demands  for  finer
next-generation  devices  in  the  45-nm  technology  node  and  beyond.
The RS-4000 performs at a high throughput of 1,200 DPH (defects
per  hour),  which  is  about  3  times  faster  than  the  conventional
model,  and  performs  defect  review  at  a  high  speed  and  high  defect
capture rate thereby improving image resolution (3 nm) and enhanc-
ing image processing. Combined with ADC (automatic defect classi-
fication)  to  identify  killer  defects,  the  tool  produces  data  directly
linked  with  yield  enhancement  in  a  short  time.  Furthermore,  the
newly  added  function  of  tilt  image  observation  by  tilting  the  elec-
tron beam enables the tool to generate more defect information.

 

Spec:

RS-4000 (200mm/300mm  C to C)

300mm FOUP

ADR/ADC

KLA network 1/F

Dark field laser microscope acceptable

3.6 M/O drive (640MB)

Holder for 200mm wafer

Dry pump 1/F unit

Dry pump

Back-up power unit for electron-gun

EDS unit

Re-view system R11000

Report making function for R11000

Categories:
Attachments: 9 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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