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Balzers / Unaxis BA 810 Sputtering System (Refurbished) for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Balzers / Unaxis BA 810 Sputtering System (Refurbished). This Balzers / Unaxis BA 810 Sputtering System (Refurbished) is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Sputtering System (Refurbished) and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Balzers / Unaxis BA 810 Equipment Details

SDI ID: 86320
Manufacturer: Balzers / Unaxis
Model: BA 810
Description: Sputtering System (Refurbished)
Version: 810 MM X 1250 MM
Vintage: 01.06.2011
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 175,000 EUR
Comments:
-This system was completely re-manufactured in 2011 by a 3rd party engineering company ("APSy").
-The tool is in good working condition.
-Please refer to the attached photos which show the current status of this tool.

-The system can be inspected by appointment.

Here follows the tool specification following the refurbishment:-


Page 1


SUBJECT:

Supply of a large capacity CATHODIC DEPOSITION machine

Proposal

1. Chamber.

Size of the room: 810 mm.

Length of the room: 1250 mm.

2. 19 "rackable tower.

- Power Tour including different power supplies, protection, contactors, PC &

PLC.

3. Power supply.

- 380 volts three phases, neutral + earth.

- Electrical protection adapted by circuit breaker 400 volts, 63 Amp PH + Neutral.



Page 2


- Each power enclosure protected by AC type circuit breaker protection for people and

The circuits

- CE-approved electrical safety system. Safety Category: 2 & 4 for Emergency Stop

And Mobile Protectors. PNOZ-X--

4. Water supply.

- Solenoid valves and flow sensors (Rotor flowmeters with flow indicator).

2. Pumping system.

- Primary pumping

Double pump floor.

model EDWARDS 40, and ROOTS PUMP PRIMARY. From the atmosphere a 2 10-3

Torr.

Automatic N2 Breakdown PUMP ROOM

- Secondary pumping

BROADCAST pump and cold trap.

5. Cold Package

- For refrigeration cabinets with a diameter from DN 320 to DN 1000

- Temperature limit of -25 ° C to -10 ° C depending on the size.

- Refrigerant: R134a

- Baffle Ref: BFA500 installed on the machine, corresponding to a Diameter of DN 500

6. Empty playback.

- Two dual Pirani gauges / Cold cathode. ACC 2009 ADIXEN. (Pump and chamber).

Gauge combines - Inverted Magnetron Pirani &

Measurement range (air, N2) mbar (Torr) 5 x 10-9 ... 1000 (3.8 x 10-9 ... 760

(atmosphere)

Repeatability 1 × 10-8 mbar ... 100% of reading ≈ ± 5%

Precision (N2) 1 x 10-8 mbar ... 100% of reading ≈ ± 30%

- AP 2004 Pirani Gauge. Reading the atmosphere → 5 10-4 bar. Display on the screen. Reading

Of the primary pump.


Page 3


3. Cooling

- The chamber is cooled by circulation of water.

4. Power Supply Advanced Energy

- DC Magnetron, 480V Input, 10 KW, 400-1000V.

5. Cathodes (Targets not included)

- Two cathodes "PLANAR MAGNETRON" length of 1016 mm. X 152.4 mm

- Located in the center of the room and protected from each other by a cylindrical screen.

▪ Dimensions: 40 "x 6".

▪ DCM / RFM / Pulsed mode

▪ Target thickness 6 to 8 mm

▪ Fixing of targets by clamping.

▪ Reactive mode operation possible.


Page 4


7. Baratron (capacitive gauge).

- Capacitive Gauge 1 Torr.

8. Mass Flow Controller HORIBA.

- SEC-E440J.

▪ N2 200 SCCM

▪ CH4 200 SCCM

- Analog MFC, normally closed solenoid valve. Sealing metal seal.

¼ "VCR Connectors

- 4 - UHP tire valve APTech

- Reference: AP-3540-S-2PW-FV4-FV4

9. Tools for handling substrates.

10. Automation & supervision SYSTEM APPLICATION.

- Automate.

* Realization ApSy of a PLC.

- Installation of a SAIA PCD3 or SIEMENS controller and supervision under WINDEV 15.

- The PLC permanently manages the operation of the machine, the PC visualizes, sends to the PLC

Programs and stores information.

- Manual or automatic operation.

- A synopsis permanently indicates the state of the system, with the possibility to act on the different

Icons for opening or closing components (valves, gauges, pumps, etc.).


Page 5


- The system can be connected to the internet for troubleshooting or upgrades of the software.

- Communication between PLC and machine, as well as from PC to PLC through "HUB"

(Ethernet communication)

- Support for the follow-up of the dynamic process in the form of curves or figures.

- Several maintenance pages showing the outputs & logic & analog inputs of

The controller, and gives the possibility of acting directly on the actuators.

- Approval to the CE standards of the machine.

- PLC functions

Start the pump.

pumping cycle management (opening, closing valves according to

safety).

Control and management of movements (cache, rotation subtrats support)

Control and management of the flow of cold water.

Management and reading empty.

Control of the "power supply" (steering and reading different parameters).

control and alarm management. (H2O, Air, Hoods and Power) Alarms will be

Associated with a textual description and will be of different levels, either blocking or

Or in the form of a warning These alarms will be kept in a file.

Checking the leakage rate and archiving.

This set of functions can be completed at the customer's request at

Of the specifications.

PCD3 controller.


Page 6



Page 7


11. Supervision SYSTEM APPLICATION under WINDEV 15.

12. Improvements and Advantages of the Computer Controller.

- This upgrade provides support for the follow-up of the dynamic process, under

Form of curves or figures, but also in the form of archives.

- PC PLC (Ethernet communication)

- All process information is stored on the hard disk of the machine or

Other locations if the computer is connected to the network.

- Different levels of passwords, depending on whether you are an operator, maintenance, process or

administrator.

- The alarms are associated with a textual description and are of different level, either blocking

Or as a warning These alarms will be kept in a file.

- A synoptic will permanently indicate the state of the system, with the possibility of acting on the

Different icons for opening or closing components (valves, gauges, pumps, etc.).

- Several maintenance pages showing the outputs & logic & analog inputs of

The controller, and gives the possibility of acting directly on the actuators.

- Ability to remotely control and control the machine. Through an internet connection. (TV-

maintenance).

13. 19 "rackmount computer.

▪ Case 1u 512f-260b

▪ Motherboard pdml-ln2 +

▪ Intel Core 2 Processor e6500

▪ Radiator snk-p0016

▪ 2 bars of 1 go kingston

▪ 320 GB serial ata western disc

▪ Slim dvd recorder

▪ Windows 7 Pro 32 bit software

▪ Usb socket on front and back.

▪ 1 x rs232 socket on the back

▪ Network connection 1000/100 mb / s

- 1 switch 5 port 10/100 MB

- Inverter apc sc450rmi1u

14. CE conformity.

- Machine to the CE norms in force today.



Page 8


16. Installation conditions at the customer.

FACILITIES:

▪ Cold water: 1000 L / hour at 5.5 bar

▪ Hot water at the AP: 900L / hour, at 4 bars.

▪ Air: 6 bars

▪ Nitrogen gas: 2 bars

▪ Argon gas: 1.5 bars

▪ Specific gas: 1.5 bars

CLEANROOM

▪ Control of particles by absolute filter

▪ Dressing room

▪ Controlled and temperature controlled at 20 ° C

▪ Hygrometry controlled and regulated at 40%

▪ Ceiling height 2.5m



Page 9





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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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