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Novellus Concept 3 Speed 300mm for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus Concept 3 Speed 300mm.
Please click on the "Send More Details" button at the end of the Concept 3 Speed description, if you'd like to get more details, photos and specifications of this 300mm, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus Concept 3 Speed 300mm is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Novellus Concept 3 Speed Equipment Details

SDI ID: 86324
Manufacturer: Novellus
Model: Concept 3 Speed
Description: 300mm
Version: Inquire
Vintage: 01.06.2005
Quantity: 0
Sales Condition: as is where is
Lead Time: Inquire
Sales Price (each): Inquire
Comments:
Novellus C3 SPEED Configuration
                         
          Customer Name :   Form :    
                         
Order Information
                         
    Manufactured Date:  2005   Disassembly:      Machine Type:     
    Auditor:      Assembly:        Serial Number:  D9413A  
    Supervisor:      Final Test:    Copying an Existing System:     
    Ship Date:      Source Inspection:    Copy of Configuration Available:     
                         
System Diagram
   Wafer Size                300mm Triple Speed.jpg,090323 C2 Speed JPEG.jpg
 
              System Main Power
300mm                 35Wires 208V
                    System UPS Power  
Module A             Module B   33Wires 120V
NeXT             NeXT   Loadlock Dry Pump Model
Process A             Process B      
STI/IMD             STI/IMD   Slit Valve Insert 
                 
                Slit Valve Type
                    SMC L-Motion
                TM Dry Pump Model
Module C                    
NeXT             Loadlock Baratron Model   TM Turbo Pump Model
Process C             MKS   PFEIFFER TMH261 PXS
STI/IMD                 TM Throttle Valve Model
                MKS
              IOC Version   TM Baratron Model
              V 4.6   MKS
TM Robot Type          
Mag 7        
TM Robot Blade Wafer sensor     Fab Installation EMO's         Front Monitor
Ceramic Existence   Yes Push Button   12" LCD
Software Revision           Signal Tower   Module Controller      Host Interface  
      Yes   MC3 GEM    
                         
System Information
  ATM Robot VAC Robot     Loadlock Valve   ATM Loadlock Valve  
  ATR8   MAG7   SMC   VAT  
                         
  Pod loader                    
  Brooks Fixload 6M                    
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
Module A Information
  Chamber Type Chamber Process   Module Serial Number   Process Clean Type  
  NeXT   SIT/IMD   D9413A, 57   NPP RPC  
  ESC Type   Module Controller   Module Turbo Pump     Module Dry Pump  
      MC3   Leybold MAGW2000CT      
  Pendulum valve Throttle Valve   ESC / Dome Cooling   Temp Monitoring  
  MKS           NTM500  
  HF Generator   MF Generator   LF Generator     RF Match  
  AE_10K   AE PDX_5000   AE PDX_8000   AE NAVIGATOR 10013 L80  
  Heat exchanger   IOC Version   Dual Clean Injector Kit     Injector Type  
      V4.72   Yes    Star short   
  Louvered Screen   Pedestal Lift Type   Foreline Type     Injector Size  
  Yes   Servo Motor   Large    N/A  
                         
                         
Chamber Gas Box                  
  MFC Number Gas Name      MFCSize MFC Model      
  MFC1 SiH4 100 Sccm Brooks SLA7950S        
  MFC2 SiH4 200 Sccm Brooks SLA7950S        
  MFC8 Ar 3000 Sccm Brooks SLA7950S        
  MFC5 H2 1500 Sccm Brooks GF125C        
  MFC3 NF3 5000 Sccm Brooks SLA7950S        
  MFC9 O2 500 Sccm Brooks SLA7950S        
  MFC6 Ar 500 Sccm Brooks SLA7950S        
  MFC7 HE 1000 Sccm Brooks SLA7950S        
                 
                   
                   
                 
                     
                     
                     
                     
                         
Module A Notes:                    
                         
  * Installed Black shield                  
  * Top clean modified by NPP                
  * Installed  EPD (Not Use)                
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
Module B Information
  Chamber Type Chamber Process   Module Serial Number   Process Clean Type  
  NeXT   SIT/IMD   D9413A, 53   NPP RPC  
  ESC Type   Module Controller   Module Turbo Pump     Module Dry Pump  
      MC3   Leybold MAGW2000CT      
  Pendulum valve Throttle Valve   ESC / Dome Cooling   Temp Monitoring  
  MKS           NTM500  
  HF Generator   MF Generator   LF Generator     RF Match  
  AE_10K   AE PDX_5000   AE PDX_8000   AE NAVIGATOR 10013 L80  
  Heat exchanger   IOC Version   Dual Clean Injector Kit     Injector Type  
      V4.72   Yes    Star short   
  Louvered Screen   Pedestal Lift Type   Foreline Type     Injector Size  
  Yes   Servo Motor   Large    N/A  
                         
                         
Chamber Gas Box                  
  MFC Number Gas Name      MFCSize MFC Model      
  MFC1 SiH4 100 Sccm Brooks GF125C        
  MFC2 SiH4 200 Sccm Brooks GF125C   Deinstall  
  MFC8 Ar 3000 Sccm Brooks SLA7950S        
  MFC5 H2 1500 Sccm Brooks SLA7950S        
  MFC3 NF3 5000 Sccm Brooks GF125C        
  MFC9 O2 500 Sccm Brooks SLA7950S        
  MFC6 Ar 500 Sccm Brooks SLA7950S   Deinstall  
  MFC7 HE 1000 Sccm Brooks SLA7950S        
                 
                   
                   
                 
                     
                     
                     
                     
                         
Module B Notes:                    
                         
  * Installed Black shield                  
  * Top clean modified by NPP                
  * Installed  EPD (Not Use)                
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
Module C Information
  Chamber Type Chamber Process   Module Serial Number   Process Clean Type  
  NeXT   SIT/IMD   D12181A   NPP RPC  
  ESC Type   Module Controller   Module Turbo Pump     Module Dry Pump  
      MC3   Leybold MAGW2000CT      
  Pendulum valve Throttle Valve   ESC / Dome Cooling   Temp Monitoring  
  MKS           NTM DELTA C  
  HF Generator   MF Generator   LF Generator     RF Match  
  AE_10K   AE PDX_5000   AE PDX_8000   AE NAVIGATOR 10013 L80  
  Heat exchanger   IOC Version   Dual Clean Injector Kit     Injector Type  
      V4.72   Yes    Star short   
  Louvered Screen   Pedestal Lift Type   Foreline Type     Injector Size  
  Yes   Servo Motor   Large    N/A  
                         
                         
Chamber Gas Box                  
  MFC Number Gas Name      MFCSize MFC Model      
  MFC1 SiH4 100 Sccm Brooks SLA7950S        
  MFC2 SiH4 200 Sccm Brooks SLA7950S        
  MFC8 Ar 3000 Sccm Brooks GF125C        
  MFC5 H2 1500 Sccm Brooks GF125C        
  MFC3 NF3 5000 Sccm Brooks GF125C        
  MFC9 O2 500 Sccm Brooks SLA7950S        
  MFC6 Ar 500 Sccm Brooks SLA7950S        
  MFC7 HE 1000 Sccm Brooks SLA7950S        
                 
                   
                   
                 
                     
                     
                     
                     
                         
Module C Notes:                    
                         
  * Installed Black shield                  
  * Top clean modified by NPP                
  * Installed  EPD (Not Use)                
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
                         
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