HITACHI S9380 FE SEM for Sale

fabsurplus.com is pleased to announce the availability of the following listed used HITACHI S9380 FE SEM. This HITACHI S9380 FE SEM is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this FE SEM and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

HITACHI S9380 Equipment Details

SDI ID: 86510
Manufacturer: HITACHI
Model: S9380
Description: FE SEM
Version: 300 mm
Vintage: 01.05.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Deinstalled, warehoused. Can be inspected by appointment.

Price: Please make best offer.

Usable for measurements from 0.05 um to 2.0 um
Fitted with qty 3 x 300 mm FIMS
Accellerating voltage range: 300 to 1600 Volts
Operating software type: Unix V22.06

Standard Specifications
  • Targets to all sub-100nm processes
  • Resolution: 2.0nm
  • Beam energy range: 300eV to 1600eV (200eV optional)
  • Magnification: 110x, 220x (optical microscope), 1,000x to 300,000x (SEM) Measurement system: cursor on SE intensity line profile
  • Measurement algorithms: Line / space / pitch / edge measurement
  • Averaged CD-measurement (ACD)
  • Width and edge roughness analysis
  • 2D contact hole full analysis
  • Contact hole open / close analysis
  • Shortest distance measurement
  • Corner rounding measurement
  • Golden pattern score matching
  • Precision (repeatability / reproducibility): 0.8nm (0.5nm/0.6nm) 3-sigma
  • Electron optics: Schottky emission
  • Boosting / retarding system
  • High excitation low aberration lens
  • Stage: X/Y, laser interferometer controlled
  • Autoloader: 2 or 3 FOUPs random access (8" open cassette or SMIF optional) Throughput (20 points): 33 wph
  • MAM time: 3.8 seconds
Attachments: 21 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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