fabsurplus.com




This item has been sold - HITACHI S9380 FE SEM for Sale


Other items that might interest you
No image available
No image available
No image available

HITACHI S9380 Details

SDI ID: 86510
Manufacturer: HITACHI
Model: S9380
Description: FE SEM
Version: 300 mm
Vintage: 01.05.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Comments:
Deinstalled, warehoused. Can be inspected by appointment.

Price: Please make best offer.

Usable for measurements from 0.05 um to 2.0 um
Fitted with qty 3 x 300 mm FIMS
Accellerating voltage range: 300 to 1600 Volts
Operating software type: Unix V22.06

Standard Specifications
  • Targets to all sub-100nm processes
  • Resolution: 2.0nm
  • Beam energy range: 300eV to 1600eV (200eV optional)
  • Magnification: 110x, 220x (optical microscope), 1,000x to 300,000x (SEM) Measurement system: cursor on SE intensity line profile
  • Measurement algorithms: Line / space / pitch / edge measurement
  • Averaged CD-measurement (ACD)
  • Width and edge roughness analysis
  • 2D contact hole full analysis
  • Contact hole open / close analysis
  • Shortest distance measurement
  • Corner rounding measurement
  • Golden pattern score matching
  • Precision (repeatability / reproducibility): 0.8nm (0.5nm/0.6nm) 3-sigma
  • Electron optics: Schottky emission
  • Boosting / retarding system
  • High excitation low aberration lens
  • Stage: X/Y, laser interferometer controlled
  • Autoloader: 2 or 3 FOUPs random access (8" open cassette or SMIF optional) Throughput (20 points): 33 wph
  • MAM time: 3.8 seconds
Attachments: 21 Files


Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us




View all HITACHI items for sale
View all S9380 items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, SDI-Fabsurplus Ireland ltd. and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form