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Applied Materials XR 80 High Current Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials XR 80 High Current Implanter.
Please click on the "Send More Details" button at the end of the XR 80 description, if you'd like to get more details, photos and specifications of this High Current Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials XR 80 High Current Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials XR 80 Equipment Details

SDI ID: 86620
Manufacturer: Applied Materials
Model: XR 80
Description: High Current Implanter
Version: 200 mm
Vintage: 01.06.1997
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 650,000 USD
Comments:

-Fully Refurbished
-Currently installed and operational
-Can be inspected by appointment
-At the price shown, the tool is sold "as is, where is".

-Located in Asia region

System Status

 

Wafer Size

Software Ver

4.13.00

SERIAL NO#

33x

Vintage

24/5/97

 

NO#

Check point

Condition

Type/Model

Remarks

1

Main Components

1.1

Depoder

N/A

 

 

1.2

Processor Module

OK

 

 

1.3

Beamline Module

OK

 

 

1.4

Source Services Module

OK

 

 

1.5

Processor Rack

Looks OK

 

 

1.6

Heatexchanger/PDU

Ok

 

Separate H/Exchanger and PDU

1.7

Mini Enviroment

N/A

 

 

1.8

Mobile PC & Desk

OK

 

 

1.9

Clean room Monitor

OK

 

 

1.1

Control Module (VME)

OK

 

 

1.11

Enclosure

Looks OK

 

 

1.12

Signal Tower

yes

 

 

1.13

TEM Probe

yes

 

 

1.14

VESDA smoke detector

No

 

 

1.15

ISO TX

No

 

 

1.16

Mains Matching TX

yes

 

 

2

Beamline, Controllers PSU's And Assy:

2.1

Pre Accel/Mag Cont

yes

 

 

2.2

Beamline Inst

yes

 

 

2.3

Vacuum Cont

yes

 

 

2.4

Post A Cont

yes

 

 

2.5

Turbo Controllers

yes

 

 

2.6

Focus PSU

yes

 

 

2.7

Decel PSU

No

 

 

2.8

A Mag PSU

yes

 

 

2.9

Pre A Converter PSU

yes

 

 

2.10

Source Mag PSU

yes

 

 

2.11

Suppession PSU

yes

 

 

 

 

 

 

 

3

Beam Path Components, Source / Extraction/Flight Tube / MRS And PFS Assy:

3.1

Source Head Type

yes

IHC

 

3.2

Extraction Type

yes

Dual Bellows

 

3.3

Flight Tube

yes

 

 

3.4

MRS

yes

 

 

3.5

Pre Defining

yes

 

 

3.6

PFS Type

yes

STD PFS

 

4

Gas Cabinet (source services):

 

Module

 

SDS/HP

 

4.1

GeF4

 

HP

 

4.2

BF3

 

HP

 

4.3

Module

 

SDS

 

4.4

Module

 

SDS

 

4.5

 

 

 

 

4.6

 

 

 

 

4.7

Purge Module

yes

 

 

 

PSU's, Controllers and Assy:

4.8

Gas and Temp Cont

yes

 

 

4.9

Filament PSU

yes

 

Xantrex

4.10

Arc PSU

yes

 

 

4.11

Bias PSU

yes

 

 

4.12

DPS

yes

 

 

4.13

Pre A HV Stack

yes

 

 

4.14

G2 PSU & components

yes

 

 

4.15

Source Iso TX

yes

 

 

4.16

Arc/Fil Chassis (9500)

N/A

 

 

5

Vacuum system

 

 

Make

Model

 

5.1

Source Turbo Pump

Leybold

1000C

 

5.2

MRS Turbo Pump

Leybold

361C

 

 

Turbo Pump Contollers

Turbotronik

NT20

 

5.3

Beamline Dry Pump

Edwards

QDP 40

 

5.4

Processor Dry Pump

Edwards

QDP 80

 

5.5

Processor Booster Pump

Edwards

EH500A

 

5.6

Side Cryo Pump

CTI

CTI-10

 

5.7

Rear Cryo Pump

CTI

CTI-10

 

5.8

Side Cryo Crompressor

 

 

 

5.9

Rear Cryo Compressor

 

 

 

6

Processor PSU's controller and Assy:

6.1

Wheel & Components

yes

 

 

6.2

Spin Motor

yes

 

 

6.3

Gripper

yes

 

 

6.4

Transfer Arm

yes

 

 

6.5

Clip Actuator

yes

 

 

6.6

Blade

yes

 

 

6.7

A/B Sensor

yes

 

 

6.8

Tilt Assy

yes

 

0-10

6.9

PFS DP Box

yes

 

 

6.10

Beam Stop

yes

 

 

6.11

Beam Profiler

yes

 

 

6.12

Filament PSU (PFS)

yes

 

 

 

Wafer Loader/ Mini Enviroment Assy

6.13

Exchange Arms

N/A

 

 

6.14

Carousel

yes

 

 

6.15

Indexer

yes

 

 

6.16

W/L Door

yes

 

 

6.17

Orientor

yes

 

Notch

6.18

Cassettes/ Trays

yes

 

 

6.19

Pre Aligners

N/A

 

 

6.20

Dummy Cassette

N/A

 

 

6.21

Aligner Controllers

N/A

 

 

6.22

Arm Servo PSU (XR80)

yes

 

 

6.23

Arm Servo Cont (XR80)

yes

 

 

 

 

 

 

 

7

ISO TX 9500 only

7.1

Post A HV Stack

N/A

 

 

7.2

Post A Converter PSU

N/A

 

 

7.3

Post A Controller

N/A

 

 

 

 

 

 

 

8

Control Rack:

8.1

DAQ PDU

yes

 

 

8.2

Option Chassis

yes

 

 

8.3

Target Sys Inst

yes

 

 

8.4

W/L Cont

yes

 

 

8.5

W/L Vacuum

yes

 

 

8.6

Ground PDU

yes

 

 

8.7

Target Sys Vacuum

yes

 

 

8.8

Spin/Scan Cont

yes

 

 

8.9

Direct Drive interface

yes

 

 

8.10

Plasma Flood Chassis

yes

 

 

8.11

Scan Amp

yes

 

 

8.12

Spin Amp

yes

 

 

8.13

Spin/Scan PDU

yes

 

 

8.14

Bleed Resistor

yes

 

 

8.15

Motech 80

yes

 

 

8.16

Compact Scan

N/A

 

 

 

VME:

8.17

PMAC Vac/Atmos

yes

 

 

8.18

CPU Main Board

yes

 

 

8.19

Loop Cont

yes

 

 

9

Facilities (Top/Bottom/Remote)

9.1

 

 

 

 

 

 









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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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