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8 inch Partial Wafer Fab Line for Sale


fabsurplus.com is pleased to announce the availability of the following listed used 8 inch Partial Wafer Fab Line. This 8 inch Partial Wafer Fab Line is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Wafer Fab Line and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


8 inch Partial Equipment Details

SDI ID: 87074
Manufacturer: 8 inch
Model: Partial
Description: Wafer Fab Line
Version: 200 mm
Vintage: 01.06.2010
Quantity: 15
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:

15 ITEMS OF 8 INCH WAFER FAB EQUIPMENT ARE Available for purchase as follows.

-Some tools still installed.
-Some tools already removed to warehouse.
-The equipment is available for purchase now.
-Inspection is available by appointment.
-Please make your best offers for the purchase of this equipment.
-You can offer for individual items or all equipment.
-Please refer to the attached excel spreadsheet for details.

 

SDI ID Manufacturer Model Description Quantity Version Condition Vintage Comments
87050 Accretech / TSK APM 90A Prober 1 200 mm missing parts 01.06.1998 -deinstalled
-warehoused
-missing some parts
-was used with Teradyne J994 tester
-includes MHF 300 manipulator
87051 Accretech / TSK APM 90A Prober 1 200 mm missing parts 01.06.1998 -At the warehouse
-Can be inspected by appointment
-Was used with Teradyne J994
-With MHF 300 manipulator
-Missing some electronic parts and boards
-See attached photo for details
87052 Accretech / TSK APM 90A Prober 1 200 mm missing parts 01.06.1998 -De-installed
-In the warehouse
-Missing some PC boards and some mechanical parts
-see attached photos for details
89010 Accretech / TSK APM-90A Prober 1 200 mm missing parts   In the warehouse, missing parts
89007 Applied Materials SemVision CX Scanning Electron Microscope 1 200 mm     Still in the cleanroom, can be inspected by appointment, has a CE mark
87057 ASML PAS 5500 /750E DUV Scanner 248 nm 1 200 mm missing parts 01.09.2008 In the cleanroom; Can be inspected by appointment.
-This tool was installed in July 2008
-This tool was switched off in Octoner 2012
-The tool was under an ASML support program when operational.
-Since it was switched off, it has been stored in the cleanroom.
-Various parts have been removed
-sw version 8.9.0
-SAT data is attached

Generic performance specification for the /750E model are as follows:-

-The ASML /750E model was first introduced in April 2000.
-It was designed for use at the 130 nm node
-The 750E scanner has a DUV lens from Carl Zeiss Jena GmbH--the Starlith
750--with an NA of 0.7.
-Overlay capability is less than 30 nm for single-machine operation and 45
nm for matched machine overlay.
-The 5500/750E includes a Quasar module, which enables multipole
illumination. It also has double exposure capability.
-The scanner has a throughput of 120 eight-inch wafers per hour in
production conditions of 50 mJ/cm2 and 46 exposure fields.
-The original base price for the system in April 2000 was $8.6 million.

Here is a list of the known missing parts:-

Computer System:
SUN STATION ASSEMBLED ULTRA 10/ CRT Monitor/ Mouse trackball
SCR rack:
Current amplifier CPU board TCS3x Mater/ TC3X current amplifier all 6
boards /
+5V PSU/+24VPSU/
AAR rack:
All power supply boards/ CPU/Optical and Analog demodulators boards/
CSU Rack not present
RRR Rack Not present
WHR Rack not present
LPR Rack not present
WPR Rack :
PSDC 48V
MSR Rack :
Power supplies 5 V and 7V/LS and AL Hinds controllers
RMR rack:
Velocity Drive digital/ Sensor board/Z sensor Analog and digitals boards
IL Rack:
Illumination interface board/PID 2,4,5 boars/ Power amplifier board/ Level
master
board/PTI board
ARMS rack:
Library card1/Remote reset/CPU
Wafer Handling module:
Gripper Unit/Prealignment Unit/Discharge unit/Input pedestal/Dipod unit/
Switch
clamp valve
Reticle handling module:
All 3 libraries/ Upper and lower robot
Illumination Module:
Doe Exchanger/ ACL board/ BMU/Beam stearing/ LSI board
AIR mount module:
All 3 Servo valve Tc3x block/ More geophone and pre amp boards on AM
WS module:
Two Airbearings/Short-long stroke decoupling block/ Air bearing
controllers/ all HP
receivers/ Flax cable fibre optics.
Alignment Module:
TTL laser/OA red and green laser/Power supply red and green laser/OA CCD
CAM
Temperature Conditioning module :
C&T unit and controller/Exhaust Fan/ ACC Fan and controller
Cymer laser
LASER1A8B
Tool Model: ELS-6600 Tool
LNM/WCM/MCS board/TCS board/Exhaust vacuum sensor
The laser is located in the sub-fab under the tool.
The laser has fired about 5 Million shots
87102 DNS AS 2000 POST CMP CLEANER / SCRUBBER 1 200 MM excellent 01.01.2000 -DE-INSTALLED
-WAREHOUSED
-CAN BE INSPECTED BY APPOINTMENT
-FOR OPEN 8 INCH WAFER CASSETTE LOADING
HAS SECS

CHAMBER / PROCESS:
1.DBC
2.TBC
3. DTC

MFC CONFIG:-
HF 0.49%
TMAH 0.06%

FOR BISHOP BOATS
HAS CE MARK

89009 DNS WS820L Wet Cleaning system 1 200 mm     Still in the cleanroom, can be inspected by appointment, has a CE mark
87061 Jordan Valley Bede Metrix X-Ray difractometer (Missing Parts) 1 200 mm for spares use 01.01.2005 De-installed, warehoused.
The tool has missing parts.
87062 Koyo VF 5100B Vertical furnace for Polymide Photoresist Curing 1 200 mm good 01.04.1999 De-installed, warehoused ; Can be inspected by appointment.
-CE Marked
-HEATER TYPE: V40X130-03 LGO 1250G
-MACHINE CONTROLLER MODEL: EC 6531
-CONTROL PANEL: FA2100A
-REMOTE I/O EO6541
SECS FITTED: YES

MFC CONFIGURATION:-

1. MFC FC 782 N2 100 SLM
2. MFC FC 783 N2 20 SLM
3. MFC FC 783 N2 20 SLM

NO KNOWN MISSING PARTS
SEE GAS FLOW DIAGRAM ATTACHED.

See attached photos for details about the current condition of the tool.
87064 Microcontrol Leonardo 200 Wafer taping and de-taping 1 200 mm excellent 01.06.2000 De-installed, warehoused; Can be inspected by appointment.
87101 SEZ / LAM SP203 Backside spin etch 1 200 mm excellent 01.06.2015 -De-installed
-Warehoused
-Has CE Mark
-for open 8 inch wafer cassette loading
400 VAC setup
-3 chemical consoles

med 1 = SEE
hf 49%

med 2 = SED
-H2SO4
-HN03
-H3PO4

med 3 = DIW

-includes manuals
89008 SEZ / LAM DaVinci DV28F Wet Cleaning system 1 200 mm excellent   Still in the cleanroom, can be inspected by appointment, has a CE mark
87072 Teradyne J994 Automated Test System 1 200 mm good 01.06.2005 De-installed, warehoused; Can be inspected by appointment.
87073 Teradyne J994 Automated Test System 1 200 mm good 01.06.2005 De-installed, warehoused; Can be inspected by appointment.
Attachments: 1 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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