fabsurplus.com is pleased to announce the availability of the following listed used Kokusai Quixace ALD High-k Vertical LPCVD Furnace. This Kokusai Quixace ALD High-k Vertical LPCVD Furnace is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Vertical LPCVD Furnace and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Model:||Quixace ALD High-k|
|Description:||Vertical LPCVD Furnace|
|Sales Condition:||as is where is|
|Sales Price (each):||Inquire|
Tool is still in production. Inspect to confirm configuration and condition. Tool Model: QUIXACE (DJ-1206VN-DF) Process: CG Software version: CX5000 (OU Ver.1.50.01) Power Rating: 480 AC 3-Phase Loading Configuration: 5-loader System Configuration Furnace Unit: 1. Cartridge Heater, Qty 1 2. T/C for Heater Control, Qty 5 3. T/C for Over temperature Protection, Qty 5 4. 5-P T/C for Cascade Control, Qty 1 5. Thyristor Unit for Control, Qty 1 Clean Unit: 1. Clean Module Unit, Qty 4 Controller: 1. Main Controller (OU) , Qty 1 2. Main Operation Unit, Qty 1 3. Sub Operation Unit, Qty 1 4. Process Module Controller, Qty 1 5. DDC Temperature Controller, Qty 1 6. Gate Drive Unit, Qty 1 7. MFC/ Pressure Unit, Qty 1 8. FOUP Loader Controller Unit, Qty 1 9. Wafer Handling Controller Unit, Qty 1 10. Valve/Interlock Control Unit, Qty 1 11. Switching Hub, Qty 1 12. Signal Tower (Front), Qty 1 13. Gas Flow Pattern Panel, Qty 2 14. EDA controller, Qty 1 15. EDA Operation Unit, Qty 1 Drive Mechanisms: 1. I/O Shutter, Qty 1 2. AGV/PGV/OHT Stage, Qty 1 3. FOUP loader, Qty 1 4. Rotation FOUP Storage, Qty 1 5. FOUP Opener, Qty 1 6. Wafer Detection, Qty 2 7. Wafer Transfer, Qty 1 8. Variable Wafer Pitch Converter, Qty 1 9. Boat Elevator, Qty 1 10. Boat Changer, Qty 1 11. Furnace Port Shutter, Qty 1 12. Boat Rotation, Qty 1 13. Wafer Transfer Crash Detector, Qty 1 Gas System: 1. Gas Unit (IGS) , Qty 1 2. Bottle heater, Qty 1 3. Stainless steel Ampoule with ultrasonic Level sensor (by Praxair), Qty 1 4. 4-PT level sensor controller, Qty 1 Exhaust System: 1. Dry Pump & Mechanical Booster Pump, Qty 1 2. Diaphragm sensor (1000 Torr) (631C13TBEH) , Qty 1 3. Diaphragm sensor (10Torr) (631C11TBEH) , Qty 1 4. Diaphragm sensor (10Torr) (722B11TCE2FA) , Qty 1 5. Main Valve (VEC-SHA8-X0340) , Qty 1 6. Exhaust Piping, Qty 1 7. Exhaust Dilution Line, Qty 1 8. Reactor Tube Press Leak Line, Qty 1 9. Back Ground Line, Qty 1 10. Jacket Heater for exhaust pipe, Qty 1 11. Seal Cap Heater, Qty 1 12. Inlet Flange Heater, Qty 1 13. Reactor Tube Port Heater, Qty 1 Safety: 1. Light Curtain System, Qty 1 Other: 1. OHT I/F Unit, Qty 2 2. CIDRW CONTROLLER, Qty 1 3. AMP UNIT, Qty 2 4. CIDRW HEADDER, Qty 2 5. CHEMICAL FILTER, Qty 2 N2 Purge Load Lock System: 1. O2 Monitor/Detector, Qty 1 2. FOUP Opener N2 Purge System, Qty 1 3. Loading Area MFC, Qty 1 4. Loading Area N2 Purge Line, Qty 1 5. FOUP Opener N2 Purge Line, Qty 1
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