fabsurplus.com is pleased to announce the availability of the following listed used Kokusai Quixace II ALD High-k Vertical LPCVD Furnace. This Kokusai Quixace II ALD High-k Vertical LPCVD Furnace is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Vertical LPCVD Furnace and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Model:||Quixace II ALD High-k|
|Description:||Vertical LPCVD Furnace|
|Sales Condition:||as is where is|
|Sales Price (each):||Inquire|
Tool Status: In production. Configuration. Audit to verify. The base and necessary items for the Kokusai standard specification of the 300mm Vertical furnace system as follows: · 300 (12”) Wafer Capable, 125 Product Load Size · Rapid Heating/Cooling (RHC) · Boat Rotation · SEMI S2-0200E Compliance · Quartzware – 1st complete set for each tool · Main and Sub (Rear) Operation Controllers · Two Gas Flow Pattern Panels (Front and Rear) 300mm Vertical Furnace - Main Controller - SEMI EDA Capability - Single / Dual Boat - Multi-Injector Configuration - Integrated Gas System (IGS) Type - RHC1 Upgrade - Ceiling Heater - Quartzware (1st Set) - Rear Operation Panel - Hard Gas Pattern Panel ( 2pcs) - HPM (toxic gas) Interlock - POD ID Reader (AdvanTag GATEWAY HSMS) - OHT Capability - Exhaust APC - Heated Baratron - Boat Rotation Type - Inlet Heater - Self Gas Cleaning
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