fabsurplus.com is pleased to announce the availability of the following listed used Kokusai Quixace Ultimate ALD SiO2 Vertical Diffusion Furnace. This Kokusai Quixace Ultimate ALD SiO2 Vertical Diffusion Furnace is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Vertical Diffusion Furnace and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Model:||Quixace Ultimate ALD SiO2|
|Description:||Vertical Diffusion Furnace|
|Sales Condition:||as is where is|
|Sales Price (each):||Inquire|
Tool is still in production. Inspect to confirm configuration and condition. Tool Model: QUIXACE (DJ-1236V-DF) Process: ULT-SiO2 Software version: CX5000 (OU Ver.1.50.01) Power Rating: 480 AC 3-Phase Loading Configuration: 6-loader System Configuration Furnace Unit: 1. Cartridge Heater1 2. T/C for Heater Control, Qty 5 3. T/C for Sub Heater Control, Qty 0 4. T/C for Over temperature Protection, Qty 5 5. 5-P T/C for Cascade Control, Qty 1 6. 1-P T/C for Profile Control, Qty 0 7. Thyristor Unit for Control, Qty 1 Clean Unit: 1. Clean Module Unit, Qty 1 2. Clean Module Unit, Qty 1 Controller: 1. Main Controller (OU) , Qty 1 2. Main Operation Unit, Qty 1 3. Sub Operation Unit, Qty 1 4. Process Module Controller, Qty 1 5. DDC Temperature Controller, Qty 1 6. Gate Drive Unit, Qty 1 7. MFC/ Pressure Unit, Qty 1 8. FOUP Loader Controller Unit, Qty 1 9. Wafer Handling Controller Unit, Qty 0 10. Valve/Interlock Control Unit, Qty 1 11. Switching Hub, Qty 1 12. Signal Tower (Front) , Qty 1 13. Gas Flow Pattern Panel, Qty 2 14. EDA controller, Qty 1 15. EDA Operation Unit, Qty 0 Drive Mechanisms: 1. I/O Shutter, Qty 1 2. AGV/PGV/OHT Stage, Qty 0 3. FOUP loader, Qty 1 4. Rotation FOUP Storage, Qty 1 5. FOUP Opener, Qty 1 6. Wafer Detection, Qty 1 7. Wafer Transfer, Qty 1 8. Variable Wafer Pitch Converter, Qty 1 9. Boat Elevator, Qty 1 10. Boat Changer, Qty 1 11. Furnace Port Shutter, Qty 1 12. Boat Rotation, Qty 1 13. Wafer Transfer Crash Detector, Qty 1 Gas System: 1. Gas Unit (IGS) , Qty 1 2. Tape Heater for gas pipe, Qty 1 3. Bubbler Unit, Qty 3 Exhaust System: 1. Dry Pump & Mechanical Booster Pump, Qty 1 2. Diaphragm sensor (1000 Torr) , Qty 1 3. Diaphragm sensor (10 Torr) , Qty 1 4. Main Valve, Qty 1 5. Exhaust Piping, Qty 1 6. Exhaust Dilution Line, Qty 1 7. Reactor Tube Press Leak Line, Qty 1 8. Back Ground Line, Qty 1 9. Jacket Heater for exhaust pipe, Qty 1 10. Seal Cap Heater, Qty 1 11. Inlet Flange Heater, Qty 0 12. Inlet Port Heater, Qty 0 13. MKS Cold Trap, Qty 0 Safety: 1. Light Curtain System, Qty 1 2. Safety PLC, Qty 1 Other: 1. OHT I/F Unit, Qty 2 2. Gateway-HSMS, Qty 0 3. RF-ID AMP UNIT, Qty 2 4. CIDRW CONTROLLER, Qty 1 5. CIDRW HEAD, Qty 2 6. Chemical Filter, Qty 2
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