Novellus Sabre XT Electro Copper Plating for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus Sabre XT Electro Copper Plating.
Please click on the "Send More Details" button at the end of the Sabre XT description, if you'd like to get more details, photos and specifications of this Electro Copper Plating, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus Sabre XT Electro Copper Plating is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Novellus Sabre XT Equipment Details

SDI ID: 88537
Manufacturer: Novellus
Model: Sabre XT
Description: Electro Copper Plating
Version: 200 MM
Vintage: 01.06.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 250,000 USD

De-installed, warehoused. Can be inspected by appointment. Further details are available on request.


UI Proteus
System Controller Yes
Module Controller #1 Yes
Module Controller #2 Yes
Main System  
Tool Generation SABRE-XT
Wafer Size 200 MM
Wafer per Cassette 25
Module control system Type CTI 485 CARD
User Interface Front SIDE UI Panel(LEFT)
Signal Tower 3 colors
Mini-Environment None
GEM and Data Server GEM
Host Connection Type RS232
Chase Computer/Monitor Desktop PC / LCD
Tertiary Containment Tray None
Exhaust Kit Bottom
Drain Kit Bottom
Input Voltage 208VAC 50/60HZ 100Amps
Anneal Module (Cassette Handler)  
Load Port Ergo Cassette Loader, 3 Stations
Number of Anneal 5
Robot Type ATR 7 BROOKS
Gas Box YES
Mapping Type Rabbit Ear Thrubeam
H2 Gas Sensor Installed
Robot Firmware NA
Process Module  
Wafer Aligner Dual Sensor with Pneumatic Pusher
Robot Type AQR 7 BROOKS
End Effector SST with Vacuum Port(Dual EE)
Plating Cell Configuration Cell 1, Cell 2 and Cell 3
Clamshell Type Standard
Clamshell Cup Type POR
Diffuser Insert ID NA
Clamshell Cylinder Pressure-Vacuum Cylinder
ANODE Type Standard
Number of TI Cable 2
SAC Installed YES
Clamshell Lift IAI
ACR Installed NO
Active Top Hat YES
Plating Power Supply AE Pulse Power Supply
Post Plating Cell Configuration Cell 1, Cell 2 and Cell 3
Chuck Type PPS
Wafer Present Sensor Mount Standard
Bath Module  
Totalizer #1 Manufacturer Florite
Totalizer #2 Manufacturer Florite
Dosing Pump 1 Yes
Dosing Pump 2 Yes
Dosing Pump 3 Yes
Recirculation Pump Model #: Iwaki Walchem CMD-101
CDM Level Sensor Type Keyance
Heat Exchanger NESLAB HX-75



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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