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Novellus Sabre XT Electro Copper Plating for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Novellus Sabre XT Electro Copper Plating. This Novellus Sabre XT Electro Copper Plating is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Electro Copper Plating and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Novellus Sabre XT Equipment Details

SDI ID: 88538
Manufacturer: Novellus
Model: Sabre XT
Description: Electro Copper Plating
Version: 200 MM
Vintage: 01.06.2001
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 250,000 USD
Comments:

De-installed, warehoused. Can be inspected by appointment. Further details are available on request.

Configuration:-

Overall  
Intergrated Frame Three Plaing Modules Phase 3 Andode Chamber Three SRD modules
Anneal 5 Chamber Anneal capability 50 ~ 400 C H2/ forming gas
Process Robot Brooks 4-Axis atmospheric Dual -end effector Robot  
Front End Robot Brooks AccutranRobot    
CUP Pentium _Based    
SECS/ GEM Comparability    
System Controller Yes    
Main System  
Tool Generation SABRE-XT    
Wafer Size 200 MM    
Wafer per Cassette 25    
User Interface GUI ( Graphic User Interface)    
Signal Tower 3 colors    
Host Connection Type RS232 C    
Mini-Environment Synetics    
Chase Computer/Monitor Desktop PC    
Central Bath Reservor 150 L for 3 plating modules    
Exhaust Kit TOP Mount    
Input Voltage 208VAC 50/60HZ 100Amps    
Cassette Handler Module  
Load Port 3 Stations    
Wafer Aligner Type Mechanical Centerfinder    
End Effector Yes    
Wafer Release With Puff    
Robot Firmware Magstore 1.7.0    
Mapping Type Thru-Beam    
Plating Cell Configuration Cell 1 Cell 2 Cell 3
Clamshell 200 mm Drive Unit 200 mm Drive Unit 200 mm Drive Unit
Clamshell Cup & Cone 196 mmPhase 1A ceramic Cup 196 mmPhase 1A ceramic Cup 196 mmPhase 1A ceramic Cup
Clamshell Cylinder Pressure-Vacuum Cylinder Pressure-Vacuum Cylinder Pressure-Vacuum Cylinder
ANODE Type Phase 3 Phase 3 Phase 3
Clamshell Lift Yes Yes Yes
Additive Dosing NowPack NowPack NowPack
Bath Chemisty Control Algorithm Yes Yes Yes
Plating Power Supply AE Pulse Power Supply AE Pulse Power Supply AE Pulse Power Supply
Post Plating Cell Configuration Cell 1 Cell 2 Cell 3
Chuck Type PPS PPS PPS
Edge Bead Removal Yes Yes Yes
Wafer Present Sensor Mount Standard Standard Standard
Bath Module  
Totalizer #1 Manufacturer Florite    
Totalizer #2 Manufacturer Florite    
Dosing Pump 1 Yes    
Dosing Pump 2 Yes    
Dosing Pump 3 Yes    
Recirculation Pump Model #: Inverter    
Heat Exchanger NESLAB HX-75 A    

 

 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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