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SEN GSD-LEX Ultra-Low Energy Ion Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used SEN GSD-LEX Ultra-Low Energy Ion Implanter.
Please click on the "Send More Details" button at the end of the GSD-LEX description, if you'd like to get more details, photos and specifications of this Ultra-Low Energy Ion Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SEN GSD-LEX Ultra-Low Energy Ion Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


SEN GSD-LEX Equipment Details

SDI ID: 90383
Manufacturer: SEN
Model: GSD-LEX
Description: Ultra-Low Energy Ion Implanter
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Standard Specification
*********************
-For 200mm and 150mm wafers
-Designed for sub-65 nm nodes.
-High productivity in ultra-low energy applications
-Down to 0.2 keV
-Minimal energy contamination.
-Implantation energy from 0.2 keV to 70 keV
-Improved current in the low energy region
-Stabilization of beam optics at low energy using a movable ion source
-Beam convergence with confinement magnets
-Increased range in drift mode, in which there is very little energy contamination
-Deceleration mechanism that enhances productivity by ensuring the B beam at energy levels of down to 0.2 keV
-Reduced footprint and improved maintainability.
-High accuracy of implantation
-Low metal contamination and minimized cross-contamination by the installation of the Virtual Slit Disk, the Triple Surface Disk Faraday
-Minimized charge buildup by the installation of a plasma shower system
-See attached photos for details.

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Attachments: 2 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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