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Applied Materials P5000 Metal Etcher with two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH, for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials P5000 Metal Etcher with two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH,.
Please click on the "Get Quote" button at the end of the P5000 description, if you'd like to get a quotation, photos and specifications of this Metal Etcher with two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH,, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials P5000 Metal Etcher with two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH, is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials P5000 Equipment Details

SDI ID: 92063
Manufacturer: Applied Materials
Model: P5000
Description: Metal Etcher with two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH,
Version: 200 mm
Vintage: 31.05.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

See Photos for details.

The system config. is as follows:-

Configuration of P5000 Metal Etcher                  
Module Configuration
System Major Modules / Sub-Modules Qty Maker Process / Model Major Characteristics / Options Required Gases / Chemicals
Main System Main body 1 AMT METAL / P5000 two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH, Vac Robot ,TMP 2set, RF Matcher 2ea,EPD  
AC Power Box & RF Gen'r Rack 1 AMT METAL / P5000 AC Power Distribution Box, RF Generator,M/W Generator  
Serial No / Vintage       6869 / 1995.05.18  
Wafer Size / Chuck Type       6inch / ESC Type  
Metal Etch Chamber Type       R2 Chamber  
Sub System
/ Components
Major Modules / Sub-Modules Qty Maker Model Capacity / Rates Usage
Main body CH A Gas 1 1 UNIT UFC-1100A 100 SCCM BCL3
CH A Gas 2 1 UNIT UFC-8160 100 SCCM CL2
CH A Gas 3 1 UNIT UFC-1160A 100 SCCM CHF3
CH A Gas 4 1 UNIT UFC-1200A 200 SCCM N2
CH A Gas 5 1 UNIT UFC-1160A 100 SCCM O2
CH A Gas 6 1 UNIT UFC-1160A 100 SCCM CF4
CH B Gas 1 1 UNIT UFC-1100A 100 SCCM BCL3
CH B Gas 2 1 UNIT UFC-1660 100 SCCM CL2
CH B Gas 3 1 UNIT UFC-1160A 100 SCCM CHF3
CH B Gas 4 1 UNIT UFC-1660 200 SCCM N2
CH B Gas 5 1 UNIT UFC-1160A 100 SCCM O2
CH B Gas 6 1 UNIT UFC-1160A 100 SCCM CF4
ASP Gas 1 1 UNIT UFC-1160A 2 SLM N2
ASP Gas 2 1 UNIT UFC-1660 5 SLM O2
ASP Gas 3 1 UNIT UFC-1160A 100 SCCM CF4
ASP Gas 4 1 UNIT UFC-8160 100 SCCM NH3
H2O VDS 1 Tylan VC4900MEPR 500 SCCM H2O VA POR
B.P Gas 1 1 MKS - 20 SCCM HE
B.P Gas 2 1 MKS - 20 SCCM HE
CH A CM 1 MKS 127AA00001B 1 TORR  
CH B CM 1 MKS 127AA00001B 1 TORR  
ASP CM 1 1 MKS 127AA00001B 10 TORR  
ASP CM 2 1 MKS 127AA00100B 100 TORR  
B.P CM 1 1 MKS 122A11063 10 TORR  
  ` B.P CM 2 1 MKS 122A11063 10 TORR  
CH A TMP 1 Leybold NT340MC  
CH B TMP 1 Leybold NT340MC  
CH A TMP Cont 1 Leybold NT340MC  
CH B TMP Cont 1 Leybold NT340MC  
CH A Matcher 1 AMT MARK 2  
CH B Matcher 1 AMT MARK 2  
ASP M/N 1 ASTEX SXRHC  
VME 1 AMT 0010-70613  
Sys Elec 1 AMT 0010-10244  
EPD Cont 1 AMT 0010-09929  
Vac Robot 1 AMT 0010-13320  
Sub Module CH A RF Gen'r 1 ENI OEM-12A 1250W  
CH B RF Gen'r 1 ENI OEM-12B 1250W  
MW Gen'r 1 ASTEX AX2115 1500W  
           

 

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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