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Applied Materials P5000 Dry etcher, Poly, with 3 process chambers for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials P5000 Dry etcher, Poly, with 3 process chambers.
Please click on the "Get Quote" button at the end of the P5000 description, if you'd like to get a quotation, photos and specifications of this Dry etcher, Poly, with 3 process chambers, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials P5000 Dry etcher, Poly, with 3 process chambers is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials P5000 Equipment Details

SDI ID: 92064
Manufacturer: Applied Materials
Model: P5000
Description: Dry etcher, Poly, with 3 process chambers
Version: 200 mm
Vintage: 31.05.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

The system config. is as follows:-

 

Module Configuration
System Major Modules / Sub-Modules Qty Maker Process / Model Major Characteristics / Options Required Gases / Chemicals
Main System Main body 1 AMT Poly / P5000 Mark2, two Indexer, L/L CH, Orienter CH, Three Process CH, Vac Robot ,TMP 3set, RF Matcher 3ea  
AC Power Box & RF Gen'r Rack 1 AMT Poly / P5000 AC Power Distribution Box, RF Generator  
Serial No / Vintage       7260 / 96.07.14  
Wafer Size / Chuck Type       8inch / ESC Type  
Poly Etch Chamber Type       Mxp+ Chamber  
Sub System
/ Components
Major Modules / Sub-Modules Qty Maker Model Capacity / Rates Usage
Main body CH A Gas 1 1 UNIT UFC-8160 200 sccm HBr
CH A Gas 2 1 UNIT UFC-1660 100 sccm SF6
CH A Gas 3 1 UNIT UFC-8160 100 sccm CL2
CH A Gas 4 1 UNIT UFC-8160 10 sccm 30%O2/He
CH A Gas 5 1 UNIT UFC-8160 100 sccm N2
CH A Gas 6 1 UNIT UFC-8160 100 sccm CF4
CH A Gas 7 1 UNIT UFC-8160 500 sccm O2
CH B Gas 1 1 UNIT UFC-8160 200 sccm HBr
CH B Gas 2 1 UNIT UFC-8160 100 sccm SF6
CH B Gas 3 1 UNIT UFC-8160 100 sccm CL2
CH B Gas 4 1 UNIT UFC-1660 10 sccm 30%O2/He
CH B Gas 5 1 UNIT UFC-8160 100 sccm N2
CH B Gas 6 1 UNIT UFC-8160 100 sccm CF4
CH B Gas 7 1 UNIT UFC-8160 500 sccm O2
CH C Gas 1 1 UNIT UFC-8160 200 sccm HBr
CH C Gas 2 1 UNIT UFC-8160 100 sccm SF6
CH C Gas 3 1 UNIT UFC-8160 100 sccm CL2
CH C Gas 4 1 UNIT UFC-8160 10 sccm 30%O2/He
CH C Gas 5 1 UNIT UFC-8160 100 sccm N2
CH C Gas 6 1 UNIT UFC-1660 100 sccm CF4
CH C Gas 7 1 UNIT UFC-8160 500 sccm O2
CH A CM 1 MKS 127AA-00001B 1 Torr  
CH B CM 1 MKS 127AA-00001B 1 Torr  
CH C CM 1 MKS 127AA-00001B 1 Torr  
    CH A TMP 1 SeikoSeiki STP301CB1 -  
CH B TMP 1 SeikoSeiki STP301CB1 -  
CH C TMP 1 SeikoSeiki STP301CB1    
CH A TMP Cont 1 SeikoSeiki STP301CVB -  
CH B TMP Cont 1 SeikoSeiki STP301CVB -  
CH C TMP Cont 1 SeikoSeiki STP301CVB    
Matcher 3 AMT   1000W / 13.56MHz  
Gate V/V 3 AMT      
CH A RF Gen'r 1 ENI OEM-12B 1250 W  
CH B RF Gen'r 1 ENI OEM-12B 1250 W  
CH C RF Gen'r 1 ENI OEM-12B 1250 W  

 

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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