Unaxis GEN IV Mask Etcher for Sale

fabsurplus.com is pleased to announce the availability of the following listed used Unaxis GEN IV Mask Etcher. This Unaxis GEN IV Mask Etcher is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Mask Etcher and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.

Unaxis GEN IV Equipment Details

SDI ID: 92081
Manufacturer: Unaxis
Model: GEN IV
Description: Mask Etcher
Version: mask
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 2,300,000 USD
Additional Information:
The current pumps would stay with the tool, it would be (3) iH80’s, and (1) iL70.
There are currently (3) Hx70’s
chillers with the tool, and (2) spares in addition.
The operation system is Windows xP.
There was no service contract post warranty
All we have at this time is the tool Servicing Docume
List of spare parts included attached in a separate document.
Repair Issues list:
No Rear Control PC for the Tool
PM1 missing camera
PM3 Heater Box not functioning
PM2 Lift pin PCB missing
PM2 Cathode Chiller and wall signals forced (wiring issue?)
Robot Teach Pendant not functioning
Rotoflow Sensors jumpered
on all chambers (replace sensors)
PM1 Watlows not displaying correctly (replace)
PM1,2,3 have air lines and control cables running to different sticks (either the
pneumatics or controller for a certain stick went inop)
Attachments: 0 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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