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ASM Epsilon 3200 Epitaxial Deposition, RP for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASM Epsilon 3200 Epitaxial Deposition, RP.
Please click on the "Get Quote" button at the end of the Epsilon 3200 description, if you'd like to get a quotation, photos and specifications of this Epitaxial Deposition, RP, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASM Epsilon 3200 Epitaxial Deposition, RP is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASM Epsilon 3200 Equipment Details

SDI ID: 92349
Manufacturer: ASM
Model: Epsilon 3200
Description: Epitaxial Deposition, RP
Version: 300 mm
Vintage: 31.05.2007
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Configuration:-
- Still in the fab, but not hooked up
- s/w version V7.50
- 2 X ASYST SMIF loaders
- Fab interface robot type: ASYST
- Transfer robot type: Genmark
-Left handed
-Graphite: XY Carb, Deep Grid self-centering susceptor
-PSU: 50 Hz 480V
-Reactor pump: Ebara
-Software options: HSMS GEM/SECS E87, I/F A, Supervisor site licence , supervisor workstation licence qty 3

FRONT END I/F
-RF ID READER QTY 2
-BALLROOM CONFIG.
-LIGHT TOWER - 4 POSITION

TOUCHSCREEN
-Door-mounted user touchscreen

WAFER HANDLING SECTION
-Dual 25 wafer l/l
-Level 2 vacuum l/l
-Bernoulli wand

REACTOR MODULE
-HCl detector
-TEK

GAS CONTROL MODULE
Gas Box configuration:-
N2
H2 100 slm
HCl 30 slm
Low Flow HCl 500 sccm
Dopant 1 Diborane 20/200/200 (20 slm dilution MFC to be non-multi-flow).
AUX 1 DCS 500 sccm
AUX 2 GeH4 350 sccm 1% GeH4 in H2
AUX 3 CH6Si 200 sccm 20% CH6Si in H2
AUX 4 SiH4 500 sccm
AUX 5 Reserve for futire silcore loop

-Incoming Check valves qty 7
-MFC Type: Unit 8161 Digital
-Precision vent matching
-Mass Flow Verifier
-50 liter canister
-HCl detector - gas module

FACILITIES AND MAINTENANCE
-Pneumatic Gas Valve Backup Valving
-Center Thermocouple positioning fixture
-SideCar Purifier Cabinet (High Flow Version)
-Integrated Sidecar
-Standard Length wiring (75 ft)
-Quartz chamber tong

FACILITY CONNECTIONS
BOTTOM SERVICES:-
RP EXHAUST
ATM EXHAUST
COOLING WAFER
PROCESS GASES
WAFER HANDLING RP EXHAUST
ELECT. CONNECTIONS

TOP SERVICES:-
WAFER HANDLING ATM EXHAUST
N2 INPUT TO WHS
POWER MODULE
AIR EXHAUST CONNECTIONS


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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